Inventor · disambiguated record
Kun-Pi Cheng
Also filed as: CHENG KUN-PI
9 granted patents·69 citations·filing 1997–2004
87Inventor score
Files withTAIWAN SEMICONDUCTOR MFG9
Top patents by PatentIndex Score
9 records- 0156US7031794B2Smart overlay controlTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Apr 18, 2006·6 cites·19 claims
- 0253US6357131B1Overlay reliability monitorTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Mar 19, 2002·21 cites·2 claims
- 0349US6507394B1Method and apparatus for inspecting the surface of a semiconductor deviceTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jan 14, 2003·15 cites·7 claims
- 0448US7172948B2Method to avoid a laser marked area step heightTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Feb 6, 2007·5 cites·26 claims
- 0547US6735485B1Overlay registration correction method for multiple product type microelectronic fabrication foundry facilityTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 11, 2004·2 cites·19 claims
- 0644US6396567B1Method and apparatus for controlling the dose of radiations applied to a semiconductor wafer during photolithographyTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted May 28, 2002·10 cites·13 claims
- 0741US6978191B2Overlay registration control system and method employing multiple pilot lot in-line overlay registration measurementTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Dec 20, 2005·2 cites·28 claims
- 0838US5843600AUse of sub divided pattern for alignment mark recovery after inter-level dielectric planarizationTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Dec 1, 1998·7 cites·13 claims
- 0929US5902707AMask containing alignment mark protection patternTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted May 11, 1999·1 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →