Inventor · disambiguated record
Calvin Augason
Also filed as: AUGASON CALVIN · AUGASON CALVIN R
6 granted patents·1 pending application·931 citations·filing 1997–2013
87Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0198US6271148B1Method for improved remote microwave plasma source for use with substrate processing systemAPPLIED MATERIALS INC·Filed 1999·Granted Aug 7, 2001·647 cites·26 claims
- 0294US6464795B1Substrate support member for a processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Oct 15, 2002·98 cites·28 claims
- 0394US6464790B1Substrate support memberAPPLIED MATERIALS INC·Filed 2000·Granted Oct 15, 2002·126 cites·23 claims
- 0481US6026762AApparatus for improved remote microwave plasma source for use with substrate processing systemsAPPLIED MATERIALS INC·Filed 1997·Granted Feb 22, 2000·54 cites·28 claims
- 0567US9022715B2Load lock chamber designs for high-throughput processing systemAPPLIED MATERIALS INC·Filed 2013·Granted May 5, 2015·2 cites·12 claims
- 0665US9917001B2High temperature fine grain aluminum heaterDESAI ABHI·Filed 2008·Granted Mar 13, 2018·4 cites·18 claims
- 0735US2001042513A1Apparatus for improved remote microwave plasma source for use with substrate processing systemsFiled 2001·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →