Inventor · disambiguated record
Koutarou Sho
Also filed as: SHO KOUTAROU
6 granted patents·5 pending applications·44 citations·filing 1999–2016
76Inventor score
Top patents by PatentIndex Score
11 records- 0172US7662542B2Pattern forming method and semiconductor device manufacturing methodTOSHIBA KK·Filed 2006·Granted Feb 16, 2010·4 cites·12 claims
- 0270US6162745AFilm forming methodTOSHIBA KK·Filed 1999·Granted Dec 19, 2000·38 cites·19 claims
- 0366US8119313B2Method for manufacturing semiconductor deviceKOBAYASHI KATSUTOSHI·Filed 2010·Granted Feb 21, 2012·2 cites·20 claims
- 0453US10068915B2Manufacturing method for a semiconductor device including resist films different in thicknessTOSHIBA MEMORY CORP·Filed 2016·Granted Sep 4, 2018·0 cites·2 claims
- 0545US7683291B2Substrate processing method and manufacturing method of semiconductor deviceTOSHIBA KK·Filed 2006·Granted Mar 23, 2010·0 cites·18 claims
- 0645US2016260731A1Semiconductor device, manufacturing method for a semiconductor device, and nontransitory computer readable medium storing a pattern generating programTOSHIBA KK·Filed 2015·Application pending·0 cites
- 0743US2010119982A1Etching method and manufacturing method of semiconductor deviceSHO KOUTAROU·Filed 2009·Application pending·0 cites
- 0840US2014232998A1Semiconductor manufacturing apparatus and manufacturing method of semiconductor deviceTOSHIBA KK·Filed 2013·Application pending·0 cites
- 0940US2015220846A1Process conversion difference prediction device, process conversion difference prediction method, and non-transitory computer-readable recording medium containing a process conversion difference prediction programTOSHIBA KK·Filed 2014·Application pending·0 cites
- 1034US9972547B2Measurement method, manufacturing method of device, and measurement systemTOSHIBA MEMORY CORP·Filed 2016·Granted May 15, 2018·0 cites·14 claims
- 1129US2016071763A1Method of manufacturing semiconductor deviceTOSHIBA KK·Filed 2015·Application pending·0 cites
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