Inventor · disambiguated record
Miau-Shing Tsai
Also filed as: TSAI MIAU SHING
1 granted patent·2 pending applications·0 citations·filing 2009–2022
13Inventor score
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3 records- 0156US2022336228A1Metal etching with in situ plasma ashingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 0248US11699596B2Metal etching with in situ plasma ashingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 11, 2023·0 cites·17 claims
- 0348US2011086444A1Process for producing substrates free of patterns using an alpha stepper to ensure resultsTAIWAN SEMICONDUCTOR MFG·Filed 2009·Application pending·0 cites
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