Inventor · disambiguated record
Lilach Saltoun
Also filed as: SALTOUN LILACH
4 granted patents·1 pending application·6 citations·filing 2016–2021
62Inventor score
Top patents by PatentIndex Score
5 records- 0181US10831108B2Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrologyKLA CORP·Filed 2016·Granted Nov 10, 2020·5 cites·77 claims
- 0275US11249400B2Per-site residuals analysis for accurate metrology measurementsKLA CORP·Filed 2019·Granted Feb 15, 2022·1 cites·20 claims
- 0357US11862522B2Accuracy improvements in optical metrologyKLA TENCOR CORP·Filed 2021·Granted Jan 2, 2024·0 cites·9 claims
- 0450US12080610B2Wavelet system and method for ameliorating misregistration and asymmetry of semiconductor devicesKLA CORP·Filed 2020·Granted Sep 3, 2024·0 cites·21 claims
- 0543US2018047646A1Accuracy improvements in optical metrologyKLA TENCOR CORP·Filed 2017·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →