Inventor · disambiguated record
Tom Leviant
Also filed as: LEVIANT TOM
3 granted patents·1 pending application·5 citations·filing 2016–2021
54Inventor score
Top patents by PatentIndex Score
4 records- 0181US10831108B2Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrologyKLA CORP·Filed 2016·Granted Nov 10, 2020·5 cites·77 claims
- 0257US11862522B2Accuracy improvements in optical metrologyKLA TENCOR CORP·Filed 2021·Granted Jan 2, 2024·0 cites·9 claims
- 0346US11360397B2System and method for application of harmonic detectivity as a quality indicator for imaging-based overlay measurementsKLA CORP·Filed 2020·Granted Jun 14, 2022·0 cites·20 claims
- 0443US2018047646A1Accuracy improvements in optical metrologyKLA TENCOR CORP·Filed 2017·Application pending·0 cites
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