Inventor · disambiguated record
Syuichi Takahashi
Also filed as: TAKAHASHI SYUICHI
7 granted patents·2 pending applications·495 citations·filing 2000–2019
85Inventor score
Top patents by PatentIndex Score
9 records- 0197USD496008SExhaust ring for manufacturing semiconductorsTOKYO ELECTRON LTD·Filed 2003·Granted Sep 14, 2004·441 cites·1 claims
- 0288US8252132B2Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck deviceYOSHIOKA KEN·Filed 2010·Granted Aug 28, 2012·9 cites·9 claims
- 0379US6523352B1Piping support of gas turbine steam cooled combustorTOHOKU ELECTRIC POWER CO·Filed 2000·Granted Feb 25, 2003·40 cites·2 claims
- 0466US10497545B2Plasma processing apparatus and cleaning methodTOKYO ELECTRON LTD·Filed 2015·Granted Dec 3, 2019·1 cites·11 claims
- 0564US9017786B2Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck deviceYOSHIOKA KEN·Filed 2012·Granted Apr 28, 2015·1 cites·11 claims
- 0662US11430636B2Plasma processing apparatus and cleaning methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 30, 2022·0 cites·20 claims
- 0760US8142609B2Plasma processing apparatusTAKAHASHI SYUICHI·Filed 2008·Granted Mar 27, 2012·3 cites·10 claims
- 0843US2008242086A1Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0938US2005274324A1Plasma processing apparatus and mounting unit thereofTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Syuichi Takahashi files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →