Inventor · disambiguated record
Robert C. Vail
Also filed as: VAIL ROBERT C
8 granted patents·242 citations·filing 1996–2005
90Inventor score
Technology areasH10P
Files withTEGAL CORP8
Top patents by PatentIndex Score
8 records- 0187US6190496B1Plasma etch reactor and method for emerging filmsTEGAL CORP·Filed 1999·Granted Feb 20, 2001·68 cites·48 claims
- 0286US6354240B1Plasma etch reactor having a plurality of magnetsTEGAL CORP·Filed 1998·Granted Mar 12, 2002·57 cites·26 claims
- 0383US6048435APlasma etch reactor and method for emerging filmsTEGAL CORP·Filed 1996·Granted Apr 11, 2000·58 cites·45 claims
- 0476US7223699B2Plasma etch reactor and methodTEGAL CORP·Filed 2005·Granted May 29, 2007·3 cites·20 claims
- 0568US6620335B1Plasma etch reactor and methodTEGAL CORP·Filed 1999·Granted Sep 16, 2003·23 cites·19 claims
- 0667US6905969B2Plasma etch reactor and methodTEGAL CORP·Filed 2002·Granted Jun 14, 2005·7 cites·17 claims
- 0755US6410448B1Plasma etch reactor and method for emerging filmsTEGAL CORP·Filed 1999·Granted Jun 25, 2002·15 cites·15 claims
- 0851US6500314B1Plasma etch reactor and methodTEGAL CORP·Filed 1996·Granted Dec 31, 2002·11 cites·61 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →