Inventor · disambiguated record
Ryusuke Ushikoshi
Also filed as: USHIKOSHI RYUSUKE
26 granted patents·1,964 citations·filing 1986–2001
98Inventor score
Top patents by PatentIndex Score
26 records- 0197US5306895ACorrosion-resistant member for chemical apparatus using halogen series corrosive gasNGK INSULATORS LTD·Filed 1992·Granted Apr 26, 1994·157 cites·23 claims
- 0297US5231690AWafer heaters for use in semiconductor-producing apparatus and heating units using such wafer heatersNGK INSULATORS LTD·Filed 1991·Granted Jul 27, 1993·320 cites·13 claims
- 0396US5800618APlasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereofNGK INSULATORS LTD·Filed 1994·Granted Sep 1, 1998·108 cites·28 claims
- 0496US5616024AApparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articlesNGK INSULATORS LTD·Filed 1995·Granted Apr 1, 1997·99 cites·20 claims
- 0596US5280156AWafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking meansNGK INSULATORS LTD·Filed 1991·Granted Jan 18, 1994·406 cites·6 claims
- 0695US5215501AHysteresis magnet coupling for roots type pumpsNGK INSULATORS LTD·Filed 1991·Granted Jun 1, 1993·65 cites·3 claims
- 0789US6101969APlasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereofNGK INSULATORS LTD·Filed 1998·Granted Aug 15, 2000·48 cites·5 claims
- 0889US6057513AJoint structure of metal member and ceramic member and method of producing the sameNGK INSULATORS LTD·Filed 1998·Granted May 2, 2000·92 cites·8 claims
- 0988US6134096AElectrostatic chuckNGK INSULATORS LTD·Filed 1999·Granted Oct 17, 2000·78 cites·12 claims
- 1086US6432208B1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Aug 13, 2002·42 cites·14 claims
- 1186US6197246B1Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereofNGK INSULATORS LTD·Filed 2000·Granted Mar 6, 2001·19 cites·4 claims
- 1285US5683606ACeramic heaters and heating devices using such ceramic heatersNGK INSULATORS LTD·Filed 1994·Granted Nov 4, 1997·60 cites·19 claims
- 1384US6106960AJoined articles, corrosion-resistant joining materials and process for producing joined articlesNGK INSULATORS LTD·Filed 1996·Granted Aug 22, 2000·46 cites·4 claims
- 1484US5794838ACeramics joined body and method of joining ceramicsNGK INSULATORS LTD·Filed 1996·Granted Aug 18, 1998·46 cites·4 claims
- 1580US5946183AElectrostatic chuckNGK INSULATORS LTD·Filed 1996·Granted Aug 31, 1999·50 cites·1 claims
- 1680US5817406ACeramic susceptor with embedded metal electrode and brazing material connectionAPPLIED MATERIALS INC·Filed 1996·Granted Oct 6, 1998·61 cites·22 claims
- 1773US5573690ACeramic articlesNGK INSULATORS LTD·Filed 1995·Granted Nov 12, 1996·36 cites·16 claims
- 1873US5490228AHeating units for use in semiconductor-producing apparatuses and production thereofNGK INSULATORS LTD·Filed 1993·Granted Feb 6, 1996·44 cites·3 claims
- 1971US6225606B1Ceramic heaterNGK INSULATORS LTD·Filed 1998·Granted May 1, 2001·31 cites·4 claims
- 2069US6617514B1Ceramics joint structure and method of producing the sameNGK INSULATORS LTD·Filed 1998·Granted Sep 9, 2003·36 cites·6 claims
- 2169US5767027AAluminum nitride sintered body and its production methodNGK INSULATORS LTD·Filed 1995·Granted Jun 16, 1998·24 cites·12 claims
- 2266US5995357ACeramic member-electric power supply connector coupling structureNGK INSULATORS LTD·Filed 1998·Granted Nov 30, 1999·23 cites·12 claims
- 2365US6975497B2Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductorNGK INSULATORS LTD·Filed 2001·Granted Dec 13, 2005·9 cites·9 claims
- 2462US6252758B1Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductorNGK INSULATORS LTD·Filed 1999·Granted Jun 26, 2001·23 cites·7 claims
- 2562US6020076AJoined ceramic structures and a process for the production thereofNGK INSULATORS LTD·Filed 1996·Granted Feb 1, 2000·27 cites·3 claims
- 2650US4762461ALeakless pumpNGK INSULATORS LTD·Filed 1986·Granted Aug 9, 1988·14 cites·11 claims
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