Inventor · disambiguated record
Brad S. Mattson
Also filed as: MATTSON BRAD S
13 granted patents·1,457 citations·filing 1990–2000
95Inventor score
Top patents by PatentIndex Score
13 records- 0197US6172337B1System and method for thermal processing of a semiconductor substrateMATTSON TECH INC·Filed 1999·Granted Jan 9, 2001·190 cites·23 claims
- 0297US6143129AInductive plasma reactorMATTSON TECH INC·Filed 1998·Granted Nov 7, 2000·374 cites·35 claims
- 0397US5811022AInductive plasma reactorMATTSON TECH INC·Filed 1994·Granted Sep 22, 1998·282 cites·57 claims
- 0496US6551447B1Inductive plasma reactorMATTSON TECH INC·Filed 2000·Granted Apr 22, 2003·113 cites·31 claims
- 0595US6403925B1System and method for thermal processing of a semiconductor substrateMATTSON TECH INC·Filed 2000·Granted Jun 11, 2002·47 cites·20 claims
- 0693US6002109ASystem and method for thermal processing of a semiconductor substrateMATTSON TECH INC·Filed 1995·Granted Dec 14, 1999·80 cites·72 claims
- 0789US6355909B1Method and apparatus for thermal processing of semiconductor substratesSANDIA CORP·Filed 2000·Granted Mar 12, 2002·43 cites·20 claims
- 0889US6342691B1Apparatus and method for thermal processing of semiconductor substratesMATTSON TECH INC·Filed 1999·Granted Jan 29, 2002·111 cites·35 claims
- 0979US6399921B1System and method for thermal processing of a semiconductor substrateMATTSON TECH INC·Filed 2000·Granted Jun 4, 2002·20 cites·45 claims
- 1079US6046439ASystem and method for thermal processing of a semiconductor substrateMATTSON TECH INC·Filed 1997·Granted Apr 4, 2000·49 cites·27 claims
- 1179US5198634APlasma contamination removal processMATTSON BRAD S·Filed 1990·Granted Mar 30, 1993·85 cites·31 claims
- 1277US6133550AMethod and apparatus for thermal processing of semiconductor substratesSANDIA CORP·Filed 1998·Granted Oct 17, 2000·44 cites·69 claims
- 1365US6043460ASystem and method for thermal processing of a semiconductor substrateMATTSON TECH INC·Filed 1999·Granted Mar 28, 2000·19 cites·28 claims
Join the waitlist — get patent alerts
Get an alert when Brad S. Mattson files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →