Inventor · disambiguated record
Naoyuki Okamura
Also filed as: OKAMURA NAOYUKI
11 granted patents·3 pending applications·15 citations·filing 2007–2022
83Inventor score
Top patents by PatentIndex Score
14 records- 0176US11923220B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Mar 5, 2024·2 cites·21 claims
- 0271US8951359B2Liquid processing apparatus, liquid processing method and computer-readable storage medium storing liquid processing programINADA TAKAO·Filed 2011·Granted Feb 10, 2015·4 cites·6 claims
- 0367US9488051B2Axially balancing a turbine using low temperature exhaustTOSHIBA KK·Filed 2013·Granted Nov 8, 2016·3 cites·4 claims
- 0466US8002894B2Processing apparatus and processing methodTOKYO ELECTRON LTD·Filed 2007·Granted Aug 23, 2011·3 cites·14 claims
- 0564US9598969B2Turbine, manufacturing method thereof, and power generating systemTOSHIBA KK·Filed 2013·Granted Mar 21, 2017·3 cites·12 claims
- 0652US9224624B2Liquid processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Dec 29, 2015·0 cites·4 claims
- 0750US2025125162A1Substrate processing method and substrate processingsystemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0849US2024290607A1Substrate processing method, substrate processing system and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0947US2024355647A1Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1045US9399949B2TurbineTOSHIBA KK·Filed 2013·Granted Jul 26, 2016·0 cites·1 claims
- 1142US10256163B2Method of treating a microelectronic substrate using dilute TMAHTOKYO ELECTRON LTD·Filed 2016·Granted Apr 9, 2019·0 cites·29 claims
- 1236US8906165B2Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatusMINAMI TERUOMI·Filed 2011·Granted Dec 9, 2014·0 cites·8 claims
- 1335US8545640B2Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatusMINAMI TERUOMI·Filed 2011·Granted Oct 1, 2013·0 cites·7 claims
- 1434US9627192B2Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing programTOKYO ELECTRON LTD·Filed 2015·Granted Apr 18, 2017·0 cites·9 claims
Join the waitlist — get patent alerts
Get an alert when Naoyuki Okamura files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →