Inventor · disambiguated record
Shawn George Thomas
Also filed as: THOMAS SHAWN · THOMAS SHAWN G · THOMAS SHAWN GEORGE
48 granted patents·19 pending applications·909 citations·filing 2002–2025
98Inventor score
Files withGLOBALWAFERS CO LTD19APPLIED MATERIALS INC13SUNEDISON SEMICONDUCTOR LTD UEN201334164H7FREESCALE SEMICONDUCTOR INC6THOMAS SHAWN3
Top patents by PatentIndex Score
67 records- 0198US8367528B2Cyclical epitaxial deposition and etchASM INC·Filed 2009·Granted Feb 5, 2013·587 cites·15 claims
- 0297US7282402B2Method of making a dual strained channel semiconductor deviceFREESCALE SEMICONDUCTOR INC·Filed 2005·Granted Oct 16, 2007·69 cites·19 claims
- 0395US11668006B2Liner assemblies for substrate processing systemsGLOBALWAFERS CO LTD·Filed 2021·Granted Jun 6, 2023·2 cites·16 claims
- 0495US7759199B2Stressor for engineered strain on channelASM INC·Filed 2007·Granted Jul 20, 2010·40 cites·15 claims
- 0594US9117670B2Inject insert liner assemblies for chemical vapor deposition systems and methods of using sameMEMC ELECTRONIC MATERIALS·Filed 2013·Granted Aug 25, 2015·20 cites·23 claims
- 0694US6831350B1Semiconductor structure with different lattice constant materials and method for forming the sameFREESCALE SEMICONDUCTOR INC·Filed 2003·Granted Dec 14, 2004·89 cites·21 claims
- 0792US11345996B2Liner assemblies for substrate processing systemsGLOBALWAFERS CO LTD·Filed 2018·Granted May 31, 2022·5 cites·20 claims
- 0892US11081386B2High resistivity SOI wafers and a method of manufacturing thereofGLOBALWAFERS CO LTD·Filed 2020·Granted Aug 3, 2021·2 cites·22 claims
- 0992US10907251B2Liner assemblies for substrate processing systemsGLOBALWAFERS CO LTD·Filed 2018·Granted Feb 2, 2021·5 cites·20 claims
- 1092US10283402B2Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stressSUNEDISON SEMICONDUCTOR LTD UEN201334164H·Filed 2016·Granted May 7, 2019·6 cites·60 claims
- 1191US10344380B2Liner assemblies for substrate processing systemsSUNEDISON INC·Filed 2014·Granted Jul 9, 2019·4 cites·24 claims
- 1289US11798835B2Methods for preparing a SOI structureGLOBALWAFERS CO LTD·Filed 2022·Granted Oct 24, 2023·1 cites·17 claims
- 1389US10072892B2Semiconductor wafer support ring for heat treatmentSUNEDISON SEMICONDUCTOR LTD UEN201334164H·Filed 2016·Granted Sep 11, 2018·5 cites·3 claims
- 1486US7029980B2Method of manufacturing SOI template layerFREESCALE SEMICONDUCTOR INC·Filed 2003·Granted Apr 18, 2006·25 cites·17 claims
- 1584US12071686B2Liner assemblies for substrate processing systemsGLOBALWAFERS CO LTD·Filed 2023·Granted Aug 27, 2024·0 cites·19 claims
- 1684US11282739B2Methods for removing an oxide film from a SOI structure and methods for preparing a SOI structureGLOBALWAFERS CO LTD·Filed 2020·Granted Mar 22, 2022·1 cites·14 claims
- 1783US10910257B2High resistivity SOI wafers and a method of manufacturing thereofGLOBALWAFERS CO LTD·Filed 2018·Granted Feb 2, 2021·2 cites·16 claims
- 1881US12180611B2Methods of forming silicon carbide coated base substrates at multiple temperaturesAPPLIED MATERIALS INC·Filed 2023·Granted Dec 31, 2024·0 cites·20 claims
- 1981US11766046B1Cake cutterTHOMAS SHAWN G·Filed 2022·Granted Sep 26, 2023·1 cites·3 claims
- 2081US10145011B2Substrate processing systems having multiple gas flow controllersSUNEDISON SEMICONDUCTOR LTD UEN201334164H·Filed 2016·Granted Dec 4, 2018·3 cites·17 claims
- 2181US10079170B2High resistivity SOI wafers and a method of manufacturing thereofSUNEDISON SEMICONDUCTOR LTD·Filed 2014·Granted Sep 18, 2018·3 cites·62 claims
- 2281US9853133B2Method of manufacturing high resistivity silicon-on-insulator substrateSUNEDISON SEMICONDUCTOR LTD (UEN201334164H)·Filed 2015·Granted Dec 26, 2017·4 cites·32 claims
- 2376US10546771B2High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiencySUNEDISON SEMICONDUCTOR LTD UEN201334164H·Filed 2017·Granted Jan 28, 2020·1 cites·37 claims
- 2476US10304722B2Method of manufacturing semiconductor-on-insulatorSUNEDISON SEMICONDUCTOR LTD·Filed 2016·Granted May 28, 2019·2 cites·33 claims
- 2575US11085112B2Susceptor with ring to limit backside depositionHAWKINS MARK·Filed 2011·Granted Aug 10, 2021·4 cites·15 claims
- 2674US11594446B2High resistivity SOI wafers and a method of manufacturing thereofGLOBALWAFERS CO LTD·Filed 2021·Granted Feb 28, 2023·0 cites·22 claims
- 2773US11239107B2High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiencyGLOBALWAFERS CO LTD·Filed 2020·Granted Feb 1, 2022·0 cites·19 claims
- 2872US10332782B2Method of manufacturing silicon germanium-on-insulatorSUNEDISON SEMICONDUCTOR LTD UEN2013341164H·Filed 2016·Granted Jun 25, 2019·2 cites·37 claims
- 2971US10832937B1High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiencyGLOBALWAFERS CO LTD·Filed 2020·Granted Nov 10, 2020·0 cites·20 claims
- 3070US11827999B2Methods of forming silicon carbide coated base substrates at multiple temperaturesAPPLIED MATERIALS INC·Filed 2021·Granted Nov 28, 2023·0 cites·13 claims
- 3170US11699615B2High resistivity semiconductor-on-insulator wafer and a method of manufactureGLOBALWAFERS CO LTD·Filed 2021·Granted Jul 11, 2023·0 cites·11 claims
- 3270US2025361647A1Uv energy sources for processing chambers, and related apparatus and methodsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3369US9127345B2Methods for depositing an epitaxial silicon germanium layer having a germanium to silicon ratio greater than 1:1 using silylgermane and a diluentCODY NYLES W·Filed 2012·Granted Sep 8, 2015·2 cites·19 claims
- 3468US11885019B2Susceptor with ring to limit backside depositionASM IP HOLDING BV·Filed 2021·Granted Jan 30, 2024·0 cites·20 claims
- 3568US9093269B2In-situ pre-clean prior to epitaxyCODY NYLES W·Filed 2011·Granted Jul 28, 2015·2 cites·37 claims
- 3667US11598021B2CVD apparatusGLOBALWAFERS CO LTD·Filed 2016·Granted Mar 7, 2023·1 cites·12 claims
- 3767US10741437B2High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiencyGLOBALWAFERS CO LTD·Filed 2019·Granted Aug 11, 2020·0 cites·20 claims
- 3866US10483152B2High resistivity semiconductor-on-insulator wafer and a method of manufacturingSUNEDISON SEMICONDUCTOR LTD UEN201334164H·Filed 2015·Granted Nov 19, 2019·1 cites·28 claims
- 3965US10784146B2Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stressGLOBALWAFERS CO LTD·Filed 2019·Granted Sep 22, 2020·0 cites·16 claims
- 4064US7056778B2Semiconductor layer formationFREESCALE SEMICONDUCTOR INC·Filed 2004·Granted Jun 6, 2006·7 cites·42 claims
- 4163US2024234627A1Chambers, methods, and apparatus for generating atomic radicals using uv lightAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4262US11015245B2Gas-phase reactor and system having exhaust plenum and components thereofASM IP HOLDING BV·Filed 2014·Granted May 25, 2021·1 cites·12 claims
- 4361US10658227B2Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stressGLOBALWAFERS CO LTD·Filed 2018·Granted May 19, 2020·0 cites·56 claims
- 4461US2024321584A1Selective oxidation processes for gate-all-around transistorsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4560US12512362B2Susceptor improvementAPPLIED MATERIALS INC·Filed 2023·Granted Dec 30, 2025·0 cites·20 claims
- 4660US2024145468A1Substrate isolated strained gate-all-around field effect transistorAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4759US2024145241A1Surface modifiers for enhanced epitaxial nucleation and wettingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4858US11139198B2High resistivity semiconductor-on-insulator wafer and a method of manufacturingGLOBALWAFERS CO LTD·Filed 2018·Granted Oct 5, 2021·0 cites·32 claims
- 4957US10510583B2Method of manufacturing silicon germanium-on-insulatorGLOBALWAFERS CO LTD·Filed 2019·Granted Dec 17, 2019·0 cites·18 claims
- 5057US7241647B2Graded semiconductor layerFREESCALE SEMICONDUCTOR INC·Filed 2004·Granted Jul 10, 2007·5 cites·29 claims
Showing the top 50 of 67 patent records by PatentIndex Score.
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