Inventor · disambiguated record

Yonghang Fu

Also filed as: FU YONGHANG

3 granted patents·1 pending application·36 citations·filing 2000–2021

70Inventor score

Technology areasG01N G01R G06T

Files withRUDOLPH TECHNOLOGIES INC2 ELECTRO SCIENT IND INC1 ISOA INC1

Top patents by PatentIndex Score

4 records

0184US7539583B2Method and system for defect detectionRUDOLPH TECHNOLOGIES INC·Filed 2005·Granted May 26, 2009·15 cites·19 claims
0273US6864971B2System and method for performing optical inspection utilizing diffracted lightISOA INC·Filed 2002·Granted Mar 8, 2005·13 cites·22 claims
0355US6813376B1System and method for detecting defects on a structure-bearing surface using optical inspectionRUDOLPH TECHNOLOGIES INC·Filed 2000·Granted Nov 2, 2004·8 cites·3 claims
0441US2023393220A1Systems and methods for use in handling componentsELECTRO SCIENT IND INC·Filed 2021·Application pending·0 cites

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →