Inventor · disambiguated record
Vinay Shah
Also filed as: SHAH VINAY · SHAH VINAY K
30 granted patents·17 pending applications·468 citations·filing 2002–2014
97Inventor score
Top patents by PatentIndex Score
47 records- 0197US7951637B2Back contact solar cells using printed dielectric barrierAPPLIED MATERIALS INC·Filed 2009·Granted May 31, 2011·68 cites·19 claims
- 0295US8689812B2Methods and loadport for purging a substrate carrierSHAH VINAY K·Filed 2012·Granted Apr 8, 2014·18 cites·10 claims
- 0395US8318512B2Automated substrate handling and film quality inspection in solar cell processingSHAH VINAY K·Filed 2010·Granted Nov 27, 2012·67 cites·20 claims
- 0495US7651306B2Cartesian robot cluster tool architectureAPPLIED MATERIALS INC·Filed 2005·Granted Jan 26, 2010·50 cites·23 claims
- 0592US8601975B2Methods and loadport apparatus for purging a substrate carrierSHAH VINAY K·Filed 2011·Granted Dec 10, 2013·11 cites·12 claims
- 0692US8066466B2Substrate processing sequence in a Cartesian robot cluster toolRICE MIKE·Filed 2010·Granted Nov 29, 2011·13 cites·17 claims
- 0791US8207005B2Forming solar cells using a patterned deposition processWEIDMAN TIMOTHY W·Filed 2011·Granted Jun 26, 2012·12 cites·17 claims
- 0891US7374393B2Method of retaining a substrate during a substrate transferring processAPPLIED MATERIALS INC·Filed 2006·Granted May 20, 2008·17 cites·4 claims
- 0990US7221993B2Systems and methods for transferring small lot size substrate carriers between processing toolsAPPLIED MATERIALS INC·Filed 2004·Granted May 22, 2007·43 cites·23 claims
- 1089US8258426B2Laser material removal methods and apparatusZHANG ZHENHUA·Filed 2009·Granted Sep 4, 2012·11 cites·17 claims
- 1189US8074597B2Methods and apparatus for purging a substrate carrierSHAH VINAY K·Filed 2007·Granted Dec 13, 2011·12 cites·13 claims
- 1288US7833351B2Batch processing platform for ALD and CVDAPPLIED MATERIALS INC·Filed 2006·Granted Nov 16, 2010·12 cites·2 claims
- 1387US7798764B2Substrate processing sequence in a cartesian robot cluster toolAPPLIED MATERIALS INC·Filed 2006·Granted Sep 21, 2010·22 cites·19 claims
- 1486US8309374B2Advanced platform for processing crystalline silicon solar cellsPORTHOUSE KEITH BRIAN·Filed 2009·Granted Nov 13, 2012·16 cites·25 claims
- 1585US8911193B2Substrate processing sequence in a cartesian robot cluster toolRICE MIKE·Filed 2011·Granted Dec 16, 2014·12 cites·7 claims
- 1685US7611319B2Methods and apparatus for identifying small lot size substrate carriersAPPLIED MATERIALS INC·Filed 2005·Granted Nov 3, 2009·10 cites·33 claims
- 1785US7374391B2Substrate gripper for a substrate handling robotAPPLIED MATERIALS INC·Filed 2005·Granted May 20, 2008·9 cites·12 claims
- 1882US8569650B2Laser material removal methods and apparatusZHANG ZHENHUA·Filed 2012·Granted Oct 29, 2013·2 cites·15 claims
- 1982US7720558B2Methods and apparatus for mapping carrier contentsAPPLIED MATERIALS INC·Filed 2005·Granted May 18, 2010·8 cites·21 claims
- 2080US7778721B2Small lot size lithography baysAPPLIED MATERIALS INC·Filed 2005·Granted Aug 17, 2010·7 cites·30 claims
- 2179US7711445B2Systems and methods for transferring small lot size substrate carriers between processing toolsAPPLIED MATERIALS INC·Filed 2006·Granted May 4, 2010·5 cites·15 claims
- 2279US7107125B2Method and apparatus for monitoring the position of a semiconductor processing robotAPPLIED MATERIALS INC·Filed 2003·Granted Sep 12, 2006·19 cites·19 claims
- 2374US7577487B2Methods and apparatus for a band to band transfer moduleAPPLIED MATERIALS INC·Filed 2006·Granted Aug 18, 2009·4 cites·21 claims
- 2472US8231431B2Solar panel edge deletion moduleGAJARIA DHRUV·Filed 2009·Granted Jul 31, 2012·7 cites·19 claims
- 2571US8672121B2Methods and apparatus for transporting substrate carriersSHAH VINAY K·Filed 2008·Granted Mar 18, 2014·7 cites·20 claims
- 2670US8356968B2Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transferAPPLIED MATERIALS INC·Filed 2009·Granted Jan 22, 2013·3 cites·14 claims
- 2768US7984543B2Methods for moving a substrate carrierAPPLIED MATERIALS INC·Filed 2009·Granted Jul 26, 2011·2 cites·17 claims
- 2858US2015098773A1Substrate processing sequence in a cartesian robot cluster toolRICE MIKE·Filed 2014·Application pending·0 cites
- 2956US7894923B2Methods and apparatus for sensing substrates in carriersKOSHTI SUSHANT S·Filed 2007·Granted Feb 22, 2011·1 cites·10 claims
- 3055US8379082B2System, methods and apparatus for substrate carrier content verification using a material handling systemAPPLIED MATERIALS INC·Filed 2009·Granted Feb 19, 2013·0 cites·16 claims
- 3152US2011162706A1Passivated polysilicon emitter solar cell and method for manufacturing the sameAPPLIED MATERIALS INC·Filed 2011·Application pending·0 cites
- 3251US2012210937A1Substrate processing apparatus using a batch processing chamberTHAKUR RANDHIR·Filed 2012·Application pending·0 cites
- 3351US2006156979A1Substrate processing apparatus using a batch processing chamberAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 3448US2006224276A1Method for monitoring the position of a semiconductor processing robotYIM PYONGWON·Filed 2006·Application pending·0 cites
- 3548US2010173495A1Substrate processing apparatus using a batch processing chamberAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 3647US2008294282A1Use of logical lots in semiconductor substrate processingAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 3746US2010145513A1Method for monitoring the position of a semiconductor processing robotAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 3845US2011041764A1Batch processing platform for ald and cvdWEBB AARON·Filed 2010·Application pending·0 cites
- 3944US2007140822A1Methods and apparatus for opening and closing substrate carriersAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 4042US2008219816A1Small lot loadport configurationsRICE MICHAEL R·Filed 2008·Application pending·0 cites
- 4142US2006182535A1Cartesian robot designRICE MIKE·Filed 2005·Application pending·0 cites
- 4240US8886354B2Methods, systems and apparatus for rapid exchange of work materialSHAH VINAY K·Filed 2010·Granted Nov 11, 2014·0 cites·22 claims
- 4338US2004018070A1Compact and high throughput semiconductor fabrication systemAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 4437US2003202865A1Substrate transfer apparatusAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 4535US2011245957A1Advanced platform for processing crystalline silicon solar cellsAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 4635US2011116900A1Substrate alignment apparatusAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 4734US2010296903A1End effector for handling substratesAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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