Inventor · disambiguated record
Shinrou Ohta
Also filed as: OHTA SHINROU
12 granted patents·1 pending application·77 citations·filing 2004–2013
90Inventor score
Top patents by PatentIndex Score
13 records- 0193US7214122B2Substrate polishing apparatusEBARA CORP·Filed 2005·Granted May 8, 2007·19 cites·14 claims
- 0290US8388408B2Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing endpoint detection methodKOBAYASHI YOICHI·Filed 2009·Granted Mar 5, 2013·15 cites·10 claims
- 0388US8157616B2Polishing end point detection methodSHIMIZU NOBURU·Filed 2009·Granted Apr 17, 2012·15 cites·14 claims
- 0481US8078419B2Polishing monitoring method and polishing apparatusKOBAYASHI YOICHI·Filed 2008·Granted Dec 13, 2011·8 cites·5 claims
- 0573US7507144B2Substrate polishing apparatusEBARA CORP·Filed 2007·Granted Mar 24, 2009·3 cites·16 claims
- 0670US7960188B2Polishing methodEBARA CORP·Filed 2009·Granted Jun 14, 2011·3 cites·4 claims
- 0767US8568199B2Polishing endpoint detection apparatusOHTA SHINROU·Filed 2010·Granted Oct 29, 2013·2 cites·11 claims
- 0866US7780503B2Polishing apparatus and polishing methodEBARA CORP·Filed 2008·Granted Aug 24, 2010·2 cites·11 claims
- 0963US7547242B2Substrate polishing apparatusEBARA CORP·Filed 2004·Granted Jun 16, 2009·7 cites·18 claims
- 1058US8777694B2Polishing endpoint detection methodEBARA CORP·Filed 2013·Granted Jul 15, 2014·0 cites·10 claims
- 1157US9068814B2Polishing monitoring method, polishing apparatus and monitoring apparatusTAKAHASHI TARO·Filed 2008·Granted Jun 30, 2015·3 cites·4 claims
- 1257US8585460B2Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method and apparatus for selecting wavelength of light for polishing endpoint detection, polishing endpoint detection method, polishing endpoint detection apparatus, and polishing monitoring methodEBARA CORP·Filed 2012·Granted Nov 19, 2013·0 cites·11 claims
- 1326US2014030826A1Polishing methodOHTA SHINROU·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →