Inventor · disambiguated record
Jose R. Gonzalez-Martin
Also filed as: GONZALEZ-MARTIN JOSE R
9 granted patents·279 citations·filing 1997–2000
92Inventor score
Technology areasH10P
Files withSPEEDFAM IPEC CORP9
Top patents by PatentIndex Score
9 records- 0193US6520839B1Load and unload station for semiconductor wafersSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 18, 2003·51 cites·25 claims
- 0292US6227946B1Robot assisted method of polishing, cleaning and drying workpiecesSPEEDFAM IPEC CORP·Filed 2000·Granted May 8, 2001·42 cites·14 claims
- 0386US6213853B1Integral machine for polishing, cleaning, rinsing and drying workpiecesSPEEDFAM IPEC CORP·Filed 1997·Granted Apr 10, 2001·58 cites·68 claims
- 0484US6852007B1Robotic method of transferring workpieces to and from workstationsSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 8, 2005·20 cites·7 claims
- 0581US6350177B1Combined CMP and wafer cleaning apparatus and associated methodsSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 26, 2002·17 cites·13 claims
- 0679US5974681AApparatus for spin drying a workpieceSPEEDFAM IPEC CORP·Filed 1997·Granted Nov 2, 1999·50 cites·12 claims
- 0773US6364745B1Mapping system for semiconductor wafer cassettesSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 2, 2002·10 cites·12 claims
- 0866US6390897B1Cleaning station integral with polishing machine for semiconductor wafersSPEEDFAM IPEC CORP·Filed 2000·Granted May 21, 2002·6 cites·8 claims
- 0964US6029369AMethods for spin drying a workpieceSPEEDFAM IPEC CORP·Filed 1999·Granted Feb 29, 2000·25 cites·9 claims
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