Inventor · disambiguated record
Hisaya Murakoshi
Also filed as: MURAKOSHI HISAYA
34 granted patents·5 pending applications·538 citations·filing 1984–2019
97Inventor score
Top patents by PatentIndex Score
39 records- 0198US6583413B1Method of inspecting a circuit pattern and inspecting instrumentHITACHI LTD·Filed 2000·Granted Jun 24, 2003·123 cites·14 claims
- 0295US6797954B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2003·Granted Sep 28, 2004·42 cites·7 claims
- 0390US7397031B2Method of inspecting a circuit pattern and inspecting instrumentHITACHI LTD·Filed 2006·Granted Jul 8, 2008·10 cites·7 claims
- 0490US7022986B2Apparatus and method for wafer pattern inspectionHITACHI HIGH TECH CORP·Filed 2002·Granted Apr 4, 2006·30 cites·14 claims
- 0590US6979823B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2004·Granted Dec 27, 2005·21 cites·9 claims
- 0687US7982188B2Apparatus and method for wafer pattern inspectionHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 19, 2011·9 cites·18 claims
- 0787US7242015B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2005·Granted Jul 10, 2007·6 cites·21 claims
- 0887US7098455B2Method of inspecting a circuit pattern and inspecting instrumentHITACHI LTD·Filed 2003·Granted Aug 29, 2006·26 cites·5 claims
- 0986US7394066B2Electron microscope and electron beam inspection systemHITACHI HIGH TECH CORP·Filed 2005·Granted Jul 1, 2008·8 cites·6 claims
- 1086US7075076B2Inspection system, inspection method, and process management methodHITACHI HIGH TECH CORP·Filed 2004·Granted Jul 11, 2006·20 cites·33 claims
- 1186US4600839ASmall-dimension measurement system by scanning electron beamHITACHI LTD·Filed 1984·Granted Jul 15, 1986·35 cites·4 claims
- 1284US7989768B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 2, 2011·6 cites·6 claims
- 1384US6476390B1Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beamsHITACHI LTD·Filed 1998·Granted Nov 5, 2002·68 cites·16 claims
- 1483US11002687B2Defect inspection method and defect inspection deviceHITACHI HIGH TECH CORP·Filed 2016·Granted May 11, 2021·2 cites·10 claims
- 1579US7288948B2Patterned wafer inspection method and apparatus thereforHITACHI HIGH TECH CORP·Filed 2004·Granted Oct 30, 2007·15 cites·14 claims
- 1678US7547884B2Pattern defect inspection method and apparatus thereofHITACHI HIGH TECH CORP·Filed 2006·Granted Jun 16, 2009·4 cites·23 claims
- 1778US4767926AElectron beam metrology systemHITACHI LTD·Filed 1986·Granted Aug 30, 1988·23 cites·2 claims
- 1876US7566871B2Method and apparatus for pattern inspectionHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 28, 2009·3 cites·10 claims
- 1975US8803411B2Charged particle beam radiation apparatusWATANABE SHUNICHI·Filed 2011·Granted Aug 12, 2014·5 cites·4 claims
- 2073US5744800ADefect observing electron microscopeHITACHI LTD·Filed 1995·Granted Apr 28, 1998·27 cites·22 claims
- 2171US8766542B2Field-emission electron gun and method for controlling sameCHO BOKLAE·Filed 2011·Granted Jul 1, 2014·6 cites·14 claims
- 2270US10923315B2Charged particle beam apparatus, and method of adjusting charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2017·Granted Feb 16, 2021·1 cites·11 claims
- 2370US5373158AField-emission transmission electron microscope and operation method thereofHITACHI LTD·Filed 1993·Granted Dec 13, 1994·21 cites·4 claims
- 2469US10170273B2Charged particle beam device, and method of manufacturing component for charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2016·Granted Jan 1, 2019·1 cites·17 claims
- 2561US8502141B2Graphical user interface for use with electron beam wafer inspectionHASEGAWA MASAKI·Filed 2009·Granted Aug 6, 2013·0 cites·16 claims
- 2660US4751384AElectron beam metrology systemHITACHI LTD·Filed 1987·Granted Jun 14, 1988·10 cites·1 claims
- 2760US4605860AApparatus for focusing a charged particle beam onto a specimenHITACHI LTD·Filed 1984·Granted Aug 12, 1986·9 cites·6 claims
- 2860US2008265161A1Electron Microscope And Electron Beam Inspection SystemMURAKOSHI HISAYA·Filed 2008·Application pending·0 cites
- 2955US11515121B2Electron beam deviceHITACHI HIGH TECH CORP·Filed 2019·Granted Nov 29, 2022·0 cites·10 claims
- 3055US7411190B2Inspection system, inspection method, and process management methodHITACHI HIGH TECH CORP·Filed 2006·Granted Aug 12, 2008·0 cites·6 claims
- 3151US8481935B2Scanning electron microscopeIKEGAMI AKIRA·Filed 2011·Granted Jul 9, 2013·0 cites·11 claims
- 3249US2007181808A1Electron microscope and electron bean inspection system.MURAKOSHI HISAYA·Filed 2007·Application pending·0 cites
- 3347US5134289AField emission electron device which produces a constant beam currentHITACHI LTD·Filed 1990·Granted Jul 28, 1992·7 cites·16 claims
- 3445US10522320B2Charged particle beam device and method for adjusting charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2016·Granted Dec 31, 2019·0 cites·9 claims
- 3544US11107655B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2017·Granted Aug 31, 2021·0 cites·14 claims
- 3636US10074506B2Method for manufacturing electron sourceHITACHI HIGH TECHONOLOGIES CORP·Filed 2012·Granted Sep 11, 2018·0 cites·18 claims
- 3735US2019079025A1Defect Inspection DeviceHITACHI HIGH TECH CORP·Filed 2016·Application pending·0 cites
- 3831US2002117635A1Patterned wafer inspection method and apparatus thereforFiled 1998·Application pending·0 cites
- 3928US2012104272A1Charged particle gun and charged particle beam deviceCHO BOKLAE·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →