Inventor · disambiguated record
Altti Torkkeli
Also filed as: TORKKELI ALTTI · TORKKELI ALTTI KALEVA
20 granted patents·6 pending applications·398 citations·filing 1995–2024
93Inventor score
Top patents by PatentIndex Score
26 records- 0195US5646729ASingle-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometerVAISALA OY·Filed 1995·Granted Jul 8, 1997·209 cites·14 claims
- 0286US5827438AElectrically modulatable thermal radiant source with specific filamentVAISALA OY·Filed 1996·Granted Oct 27, 1998·77 cites·20 claims
- 0380US6901804B2Method of manufacturing a membrane sensorVTI HAMLIN OY·Filed 2001·Granted Jun 7, 2005·29 cites·18 claims
- 0476US8104343B2Vibrating micromechanical sensor of angular velocityKLEMETTI PETRI·Filed 2008·Granted Jan 31, 2012·10 cites·15 claims
- 0575US10969575B2MEMS reflector with center supportMURATA MANUFACTURING CO·Filed 2018·Granted Apr 6, 2021·2 cites·14 claims
- 0675US5818586AMiniaturized fabry-perot spectrometer for optical analysisVALTION TEKNILLINEN·Filed 1995·Granted Oct 6, 1998·50 cites·26 claims
- 0772US10281718B2Scanning MEMS reflector systemMURATA MANUFACTURING CO·Filed 2017·Granted May 7, 2019·2 cites·17 claims
- 0870US8279615B2Encapsulation module method for production and use thereofSCHMID BERNHARD·Filed 2007·Granted Oct 2, 2012·5 cites·29 claims
- 0967US10914939B2MEMS reflector systemMURATA MANUFACTURING CO·Filed 2018·Granted Feb 9, 2021·1 cites·9 claims
- 1060US2024174511A1Mems deviceMURATA MANUFACTURING CO·Filed 2024·Application pending·0 cites
- 1158US8646333B2Vibrating micromechanical sensor of angular velocityKLEMETTI PETRI·Filed 2011·Granted Feb 11, 2014·1 cites·20 claims
- 1257US2024286890A1Double layer mems devicesMURATA MANUFACTURING CO·Filed 2024·Application pending·0 cites
- 1356US11526000B2Two-axis MEMS mirror with separated drivesMURATA MANUFACTURING CO·Filed 2020·Granted Dec 13, 2022·0 cites·17 claims
- 1456US8635909B2Vibrating micromechanical sensor of angular velocityKLEMETTI PETRI·Filed 2011·Granted Jan 28, 2014·1 cites·20 claims
- 1556US2023192480A1Method for structural layer fabrication in micromechanical devicesMURATA MANUFACTURING CO·Filed 2022·Application pending·0 cites
- 1656US2023406698A1Microelectromechanical element and a method for manufacturing itMURATA MANUFACTURING CO·Filed 2023·Application pending·0 cites
- 1755US2024343558A1Double layer mems devices and method of manufactureMURATA MANUFACTURING CO·Filed 2024·Application pending·0 cites
- 1851US9556021B2Method of manufacturing a MEMS structure and use of the methodMURATA MANUFACTURING CO·Filed 2015·Granted Jan 31, 2017·0 cites·19 claims
- 1951US2023305036A1Accelerometer element for detecting out-of-plane accelerationsMURATA MANUFACTURING CO·Filed 2023·Application pending·0 cites
- 2050US9334160B2Method of manufacturing a MEMS structureMURATA MANUFACTURING CO·Filed 2015·Granted May 10, 2016·0 cites·21 claims
- 2149US12043542B2MEMS structure including a cap with a viaMURATA MANUFACTURING CO·Filed 2020·Granted Jul 23, 2024·0 cites·10 claims
- 2247US9764942B2Multi-level micromechanical structureMURATA MANUFACTURING CO·Filed 2016·Granted Sep 19, 2017·0 cites·6 claims
- 2344US6177673B1Optically black surface for producing the sameVALTION TEKNILLINEN·Filed 1998·Granted Jan 23, 2001·11 cites·6 claims
- 2443US12202725B2Method for bonding wafers, and a waferMURATA MANUFACTURING CO·Filed 2022·Granted Jan 21, 2025·0 cites·17 claims
- 2537US9969615B2Manufacturing method of a multi-level micromechanical structure on a single layer of homogenous materialMURATA MANUFACTURING CO·Filed 2016·Granted May 15, 2018·0 cites·20 claims
- 2632US10377625B2Scanning mirror device and a method for manufacturing itMURATA MANUFACTURING CO·Filed 2017·Granted Aug 13, 2019·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →