Inventor · disambiguated record
Niles K. Macdonald
Also filed as: MACDONALD NILES · MACDONALD NILES K · MACDONALD NILES KENNETH
10 granted patents·1 pending application·101 citations·filing 1999–2013
88Inventor score
Files withKLA TENCOR TECH CORP3KLA TENCOR CORP2TEXAS INSTRUMENTS INC2ENKI TECHNOLOGY INC1GASONICS INTERNAT1
Top patents by PatentIndex Score
11 records- 0192US7838833B1Apparatus and method for e-beam dark imaging with perspective controlKLA TENCOR TECH CORP·Filed 2007·Granted Nov 23, 2010·29 cites·20 claims
- 0285US6949202B1Apparatus and method for flow of process gas in an ultra-clean environmentREFLECTIVITY INC·Filed 2000·Granted Sep 27, 2005·34 cites·104 claims
- 0383US8668960B1Flow coating apparatus and method of coatingENKI TECHNOLOGY INC·Filed 2013·Granted Mar 11, 2014·11 cites·7 claims
- 0483US7879730B2Etch selectivity enhancement in electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted Feb 1, 2011·11 cites·19 claims
- 0572US7189332B2Apparatus and method for detecting an endpoint in a vapor phase etchTEXAS INSTRUMENTS INC·Filed 2002·Granted Mar 13, 2007·8 cites·100 claims
- 0667US7755042B1Auger electron spectrometer with applied magnetic field at target surfaceKLA TENCOR CORP·Filed 2008·Granted Jul 13, 2010·2 cites·11 claims
- 0762US8052885B2Structural modification using electron beam activated chemical etchKLA TENCOR CORP·Filed 2007·Granted Nov 8, 2011·2 cites·18 claims
- 0856US2007119814A1Apparatus and method for detecting an endpoint in a vapor phase etchTEXAS INSTRUMENTS INC·Filed 2007·Application pending·0 cites
- 0954US7612348B1Transverse magnetic field voltage isolatorKLA TECHNOLOGIES CORP·Filed 2008·Granted Nov 3, 2009·0 cites·13 claims
- 1048US7394339B1Transverse magnetic field voltage isolatorKLA TENCOR TECH CORP·Filed 2004·Granted Jul 1, 2008·1 cites·21 claims
- 1133US6175095B1Resonant impedance-matching slow-wave ring structure microwave applicator for plasmasGASONICS INTERNAT·Filed 1999·Granted Jan 16, 2001·3 cites·8 claims
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