Inventor · disambiguated record
Kenneth Krzeczowski
Also filed as: KRZECZOWSKI KENNETH · KRZECZOWSKI KENNETH J
6 granted patents·104 citations·filing 2007–2007
84Inventor score
Top patents by PatentIndex Score
6 records- 0192US7838833B1Apparatus and method for e-beam dark imaging with perspective controlKLA TENCOR TECH CORP·Filed 2007·Granted Nov 23, 2010·29 cites·20 claims
- 0292US7525090B1Dynamic centering for behind-the-lens dark field imagingKLA TENCOR TECH CORP·Filed 2007·Granted Apr 28, 2009·29 cites·14 claims
- 0390US7598492B1Charged particle microscopy using super resolutionKLA TENCOR TECH CORP·Filed 2007·Granted Oct 6, 2009·26 cites·25 claims
- 0483US7879730B2Etch selectivity enhancement in electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted Feb 1, 2011·11 cites·19 claims
- 0580US7709792B2Three-dimensional imaging using electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted May 4, 2010·7 cites·21 claims
- 0662US8052885B2Structural modification using electron beam activated chemical etchKLA TENCOR CORP·Filed 2007·Granted Nov 8, 2011·2 cites·18 claims
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