Inventor · disambiguated record
Garrett Pickard
Also filed as: PICKARD GARRETT
5 granted patents·19 citations·filing 2005–2013
74Inventor score
Top patents by PatentIndex Score
5 records- 0183US7879730B2Etch selectivity enhancement in electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted Feb 1, 2011·11 cites·19 claims
- 0271US9513230B2Apparatus and method for optical inspection, magnetic field and height mappingKLA TENCOR CORP·Filed 2013·Granted Dec 6, 2016·3 cites·22 claims
- 0367US7755042B1Auger electron spectrometer with applied magnetic field at target surfaceKLA TENCOR CORP·Filed 2008·Granted Jul 13, 2010·2 cites·11 claims
- 0462US8052885B2Structural modification using electron beam activated chemical etchKLA TENCOR CORP·Filed 2007·Granted Nov 8, 2011·2 cites·18 claims
- 0561US8890066B1Sharp scattering angle trap for electron beam apparatusGOTKIS YEHIEL·Filed 2005·Granted Nov 18, 2014·1 cites·17 claims
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