Inventor · disambiguated record
Jun Emoto
Also filed as: EMOTO JUN
16 granted patents·4 pending applications·167 citations·filing 2003–2021
93Inventor score
Top patents by PatentIndex Score
20 records- 0196US7789609B2Lid opening/closing system for closed container and substrate processing method using sameTDK CORP·Filed 2008·Granted Sep 7, 2010·41 cites·12 claims
- 0293US10512948B2Gas purge unit and gas purge apparatusTDK CORP·Filed 2015·Granted Dec 24, 2019·6 cites·12 claims
- 0392US8302637B2Method of processing an object in a container and lid opening/closing system used in the methodOKABE TSUTOMU·Filed 2008·Granted Nov 6, 2012·27 cites·7 claims
- 0491US8978718B2Purge device and load port apparatus including the sameEMOTO JUN·Filed 2012·Granted Mar 17, 2015·16 cites·9 claims
- 0590US11446713B2Gas purge unit and load port apparatusTDK CORP·Filed 2018·Granted Sep 20, 2022·3 cites·15 claims
- 0690US9536765B2Load port unit and EFEM systemTDK CORP·Filed 2014·Granted Jan 3, 2017·13 cites·7 claims
- 0789US9153468B2Load port apparatusEMOTO JUN·Filed 2012·Granted Oct 6, 2015·12 cites·6 claims
- 0882US7927058B2Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load portTDK CORP·Filed 2007·Granted Apr 19, 2011·9 cites·9 claims
- 0981US9929033B2Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge methodTDK CORP·Filed 2016·Granted Mar 27, 2018·3 cites·12 claims
- 1080US9543177B2Pod and purge system using the sameTDK CORP·Filed 2015·Granted Jan 10, 2017·3 cites·7 claims
- 1176US9786531B2Gas purge unit, load port apparatus, and installation stand for purging containerTDK CORP·Filed 2014·Granted Oct 10, 2017·3 cites·19 claims
- 1270US9349627B2Lid opening/closing system for closed container and substrate processing method using sameOKABE TSUTOMU·Filed 2010·Granted May 24, 2016·2 cites·6 claims
- 1369US6795202B2Wafer processing apparatus having wafer mapping functionTDK CORP·Filed 2003·Granted Sep 21, 2004·14 cites·20 claims
- 1468US8234002B2Closed container and control system for closed containerEMOTO JUN·Filed 2009·Granted Jul 31, 2012·4 cites·7 claims
- 1568US7621714B2Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unitTDK CORP·Filed 2004·Granted Nov 24, 2009·11 cites·1 claims
- 1647US2023420272A1Gas purge unit and the load port deviceTDK CORP·Filed 2021·Application pending·0 cites
- 1745US2015194328A1Load port apparatusTDK CORP·Filed 2014·Application pending·0 cites
- 1843US2014157722A1Lid opening/closing system for closed container, and substrate processing method using the sameTDK CORP·Filed 2013·Application pending·0 cites
- 1939US9833817B2Gas purge unit, load port apparatus, and installation stand for purging containerTDK CORP·Filed 2016·Granted Dec 5, 2017·0 cites·19 claims
- 2033US2015214078A1Load port apparatusTDK CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →