Inventor · disambiguated record
Marco Polizzi
Also filed as: POLIZZI MARCO
9 granted patents·1 pending application·32 citations·filing 2005–2018
85Inventor score
Top patents by PatentIndex Score
10 records- 0196US7602470B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 13, 2009·20 cites·21 claims
- 0290US8446563B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted May 21, 2013·6 cites·24 claims
- 0383US8953142B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 10, 2015·6 cites·23 claims
- 0472US10705439B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 7, 2020·0 cites·20 claims
- 0569US9904185B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Feb 27, 2018·0 cites·20 claims
- 0666US9507278B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Nov 29, 2016·0 cites·20 claims
- 0761US10018925B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jul 10, 2018·0 cites·21 claims
- 0861US2018292762A1Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 0960US9606429B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 28, 2017·0 cites·20 claims
- 1060US9097992B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2011·Granted Aug 4, 2015·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →