Inventor · disambiguated record
Yongsun Ko
Also filed as: KO YONGSUN
26 granted patents·7 pending applications·94 citations·filing 2012–2020
95Inventor score
Top patents by PatentIndex Score
33 records- 0194US9368647B2Compositions for etchingSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 14, 2016·15 cites·20 claims
- 0291US10361100B2Apparatus and methods for treating a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jul 23, 2019·7 cites·19 claims
- 0388US9595434B2Apparatus and methods for manufacturing semiconductor devices and treating substratesSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Mar 14, 2017·6 cites·18 claims
- 0487US9859432B2Semiconductor devices having spacer protection patternSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jan 2, 2018·6 cites·20 claims
- 0587US8940182B2Compositions for etching and methods of forming a semiconductor device using the sameHONG YOUNG-TAEK·Filed 2012·Granted Jan 27, 2015·12 cites·16 claims
- 0686US9027576B2Substrate treatment systems using supercritical fluidCHO YONG-JHIN·Filed 2013·Granted May 12, 2015·10 cites·8 claims
- 0782US9941110B2Manufacturing method and fluid supply system for treating substrateSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Apr 10, 2018·3 cites·12 claims
- 0881US10580617B2Method and apparatus for plasma etchingSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Mar 3, 2020·2 cites·8 claims
- 0981US10155903B2Metal etchant compositions and methods of fabricating a semiconductor device using the sameLEE HYOSAN·Filed 2016·Granted Dec 18, 2018·3 cites·17 claims
- 1081US9735351B2Magneto-resistance random access memory device and method of manufacturing the sameLEE WONJUN·Filed 2016·Granted Aug 15, 2017·5 cites·20 claims
- 1181US9534839B2Apparatus and methods for treating a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2012·Granted Jan 3, 2017·5 cites·17 claims
- 1279US9660186B2Method of inspecting by-products and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted May 23, 2017·3 cites·20 claims
- 1378US9627233B2Substrate treating apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Apr 18, 2017·4 cites·19 claims
- 1477US9136120B2Compositions for etching and methods of forming a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Sep 15, 2015·3 cites·8 claims
- 1576US9677002B2Etching compositionSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 13, 2017·2 cites·6 claims
- 1676US9524864B2Manufacturing method and fluid supply system for treating substrateSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Dec 20, 2016·3 cites·10 claims
- 1771US11527399B2Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Dec 13, 2022·1 cites·20 claims
- 1864US9165759B2Etching composition and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Oct 20, 2015·1 cites·15 claims
- 1962US9589901B2Semiconductor wafers including indications of crystal orientation and methods of forming the sameKOO TAE-HYOUNG·Filed 2014·Granted Mar 7, 2017·3 cites·20 claims
- 2054US10096453B2Method and apparatus for plasma etchingSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Oct 9, 2018·0 cites·7 claims
- 2151US2015368557A1Metal etchant compositions and methods of fabricating a semiconductor device using the sameLEE HYOSAN·Filed 2014·Application pending·0 cites
- 2248US9934959B2Method and apparatus for purifying cleaning agentSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Apr 3, 2018·0 cites·13 claims
- 2343US10084051B2Semiconductor devices including field effect transistors and methods of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Sep 25, 2018·0 cites·20 claims
- 2443US2014360041A1Substrate treating apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
- 2543US2014373881A1Substrate treating apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
- 2642US11302526B2Supercritical drying apparatus and method of drying substrate using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Apr 12, 2022·0 cites·17 claims
- 2742US10128120B2Method of treating a layerSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 13, 2018·0 cites·20 claims
- 2840US11342203B2Substrate cleaning apparatus and substrate cleaning method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted May 24, 2022·0 cites·20 claims
- 2937US2013183824A1Method of fabricating a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2013·Application pending·0 cites
- 3034US10242880B2Method of wet etching and method of fabricating semiconductor device using the sameKIM KWANGSU·Filed 2017·Granted Mar 26, 2019·0 cites·17 claims
- 3133US2015343495A1Apparatus and methods for treating substratesKIM KYOUNGSEOB·Filed 2015·Application pending·0 cites
- 3233US2015287590A1Method of rinsing and drying semiconductor device and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
- 3331US2015303036A1Substrate treatment apparatus including sealing member having atypical sectionSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →