Inventor · disambiguated record
Shunji Hakomori
Also filed as: HAKOMORI SHUNJI
18 granted patents·455 citations·filing 1990–2003
95Inventor score
Top patents by PatentIndex Score
18 records- 0194US6402596B1Single-side polishing method for substrate edge, and apparatus thereforSPEEDFAM IPEC CO LTD·Filed 2000·Granted Jun 11, 2002·100 cites·7 claims
- 0287US5094037AEdge polisherSPEEDFAM COMPANY LTD·Filed 1990·Granted Mar 10, 1992·62 cites·14 claims
- 0382US6773335B2Apparatus for polishing periphery of device wafer and polishing methodSPEEDFAM CO LTD·Filed 2002·Granted Aug 10, 2004·29 cites·11 claims
- 0471US6290580B1Polishing method for silicon wafers which uses a polishing compound which reduces stainsSPEEDFAM PEC CO LTD·Filed 1999·Granted Sep 18, 2001·28 cites·7 claims
- 0569US6422930B2Apparatus for removing deposited filmSPEEDFAM CO LTD·Filed 2001·Granted Jul 23, 2002·13 cites·4 claims
- 0668US6093087AWafer processing machine and a processing method therebySPEEDFAM CO LTD·Filed 1999·Granted Jul 25, 2000·35 cites·5 claims
- 0767US6840841B2Wafer edge polishing systemSPEEDFAM CO LTD·Filed 2003·Granted Jan 11, 2005·11 cites·3 claims
- 0867US6159081AMethod and apparatus for mirror-polishing of workpiece edgesFiled 1998·Granted Dec 12, 2000·28 cites·15 claims
- 0963US6261160B1Method and apparatus for specular-polishing of work edgesSPEEDFAM CO LTD·Filed 1998·Granted Jul 17, 2001·24 cites·7 claims
- 1062US6478660B2Apparatus of and method for polishing the outer circumferential portions of a circular plate-shaped workSPEEDFAM CO LTD·Filed 2001·Granted Nov 12, 2002·9 cites·9 claims
- 1160US6113490AWork unloading method and surface polishing apparatus with work unloading mechanismFiled 1998·Granted Sep 5, 2000·24 cites·18 claims
- 1256US6116997ASingle side work polishing apparatusFiled 1999·Granted Sep 12, 2000·21 cites·10 claims
- 1354US6210260B1Carrier and CMP apparatusSPEEDFAM CO LTD·Filed 1999·Granted Apr 3, 2001·19 cites·5 claims
- 1452US6250995B1Apparatus for polishing outer periphery of workpieceSPEEDFAM CO LTD·Filed 1999·Granted Jun 26, 2001·15 cites·20 claims
- 1548US6139408ASurface grinding machine and carrier used thereforFiled 1999·Granted Oct 31, 2000·13 cites·8 claims
- 1643US6196906B1Surface polishing apparatus and method of taking out workpieceFiled 1999·Granted Mar 6, 2001·10 cites·38 claims
- 1739US5885140ASingle-side abrasion apparatus with dresserSPEEDFAM CO LTD·Filed 1997·Granted Mar 23, 1999·8 cites·5 claims
- 1836US6155908AWork-loading method and surface-grinding apparatus with work position deviation-adjusting mechanismFiled 1999·Granted Dec 5, 2000·6 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →