Inventor · disambiguated record
Donald W. Sweeney
Also filed as: SWEENEY DONALD W
13 granted patents·1 pending application·642 citations·filing 1983–2005
94Inventor score
Top patents by PatentIndex Score
14 records- 0194US6031598AExtreme ultraviolet lithography machineEUV LLC·Filed 1998·Granted Feb 29, 2000·148 cites·20 claims
- 0292US6821682B1Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithographyEUV LLC·Filed 2000·Granted Nov 23, 2004·61 cites·21 claims
- 0391US5986795ADeformable mirror for short wavelength applicationsFiled 1998·Granted Nov 16, 1999·101 cites·13 claims
- 0487US6235434B1Method for mask repair using defect compensationEUV LLC·Filed 1998·Granted May 22, 2001·70 cites·4 claims
- 0583US5973826AReflective optical imaging system with balanced distortionUNIV CALIFORNIA·Filed 1998·Granted Oct 26, 1999·65 cites·10 claims
- 0682US6967168B2Method to repair localized amplitude defects in a EUV lithography mask blankEUV LLC·Filed 2001·Granted Nov 22, 2005·27 cites·26 claims
- 0771US7049033B2EUV lithography reticles fabricated without the use of a patterned absorberEUV LLC·Filed 2003·Granted May 23, 2006·9 cites·14 claims
- 0871US4949389AOptical ranked-order filtering using threshold decompositionUS ENERGY·Filed 1987·Granted Aug 14, 1990·55 cites·12 claims
- 0970US6635391B2Method for fabricating reticles for EUV lithography without the use of a patterned absorberUNIV CALIFORNIA·Filed 2000·Granted Oct 21, 2003·9 cites·15 claims
- 1069US6210865B1Extreme-UV lithography condenserEUV LLC·Filed 1999·Granted Apr 3, 2001·29 cites·12 claims
- 1169US4516743AScanning beam beamrider missile guidance systemUS ARMY·Filed 1983·Granted May 14, 1985·27 cites·8 claims
- 1259US4838644APosition, rotation, and intensity invariant recognizing methodUS ENERGY·Filed 1987·Granted Jun 13, 1989·37 cites·6 claims
- 1353US7022435B2Method for the manufacture of phase shifting masks for EUV lithographyEUV LLC·Filed 2002·Granted Apr 4, 2006·4 cites·16 claims
- 1438US2006234135A1Method for repairing mask-blank defects using repair-zone compensationUNIV CA·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →