Inventor · disambiguated record
Jiyou Fu
Also filed as: FU JIYOU
8 granted patents·4 pending applications·72 citations·filing 2006–2023
83Inventor score
Top patents by PatentIndex Score
12 records- 0197US10101676B2Spectroscopic beam profile overlay metrologyKLA TENCOR CORP·Filed 2016·Granted Oct 16, 2018·15 cites·20 claims
- 0297US10072921B2Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive elementKLA TENCOR CORP·Filed 2015·Granted Sep 11, 2018·17 cites·19 claims
- 0395US7277172B2Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signalsKLA TENCOR TECH CORP·Filed 2006·Granted Oct 2, 2007·34 cites·27 claims
- 0491US9739719B2Measurement systems having linked field and pupil signal detectionKLA TENCOR CORP·Filed 2015·Granted Aug 22, 2017·6 cites·20 claims
- 0577US12085863B2Method for determining stochastic variation associated with desired patternASML NETHERLANDS BV·Filed 2023·Granted Sep 10, 2024·0 cites·20 claims
- 0666US11669019B2Method for determining stochastic variation associated with desired patternASML NETHERLANDS BV·Filed 2020·Granted Jun 6, 2023·0 cites·20 claims
- 0766US10234271B2Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detectorKLA TENCOR CORP·Filed 2018·Granted Mar 19, 2019·0 cites·20 claims
- 0855US2025385070A1Scanning electron microscopy (sem) back-scattering electron (bse) focused target and methodASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0954US2025259291A1Systems, methods, and software for multilayer metrologyASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1053US2025182443A1Image analysis based on adaptive weighting of template contoursASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1153US2025044710A1Overlay metrology based on template matching with adaptive weightingASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1247US7903250B1Control by sample reflectivityKLA TENCOR CORP·Filed 2009·Granted Mar 8, 2011·0 cites·12 claims
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