Inventor · disambiguated record
Emil Peter Schmitt-Weaver
Also filed as: SCHMITT-WEAVER EMIL PETER
18 granted patents·2 pending applications·37 citations·filing 2007–2022
91Inventor score
Top patents by PatentIndex Score
20 records- 0195US11774862B2Method of obtaining measurements, apparatus for performing a process step, and metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Oct 3, 2023·4 cites·20 claims
- 0294US10990018B2Computational metrologyASML NETHERLANDS BV·Filed 2018·Granted Apr 27, 2021·10 cites·20 claims
- 0392US11422476B2Methods and apparatus for monitoring a lithographic manufacturing processASML NETHERLANDS BV·Filed 2020·Granted Aug 23, 2022·2 cites·20 claims
- 0491US11347150B2Computational metrologyASML NETHERLANDS BV·Filed 2021·Granted May 31, 2022·2 cites·22 claims
- 0589US10627729B2Calibration method for a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Apr 21, 2020·4 cites·15 claims
- 0682US11022896B2Mark position determination methodASML NETHERLANDS BV·Filed 2017·Granted Jun 1, 2021·3 cites·20 claims
- 0780US11249404B2System and method for measurement of alignmentASML NETHERLANDS BV·Filed 2018·Granted Feb 15, 2022·2 cites·17 claims
- 0880US9715181B2Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productASML NETHERLANDS BV·Filed 2013·Granted Jul 25, 2017·3 cites·20 claims
- 0977US11175591B2Method of obtaining measurements, apparatus for performing a process step, and metrology apparatusASML NETHERLANDS BV·Filed 2017·Granted Nov 16, 2021·2 cites·24 claims
- 1075US9971251B2Lithography system and a machine learning controller for such a lithography systemASML NETHERLANDS BV·Filed 2014·Granted May 15, 2018·2 cites·21 claims
- 1174US9507279B2Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productASML NETHERLANDS BV·Filed 2013·Granted Nov 29, 2016·2 cites·9 claims
- 1273US10684557B2Method for adjusting actuation of a lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Jun 16, 2020·1 cites·21 claims
- 1371US12189302B2Computational metrologyASML NETHERLANDS BV·Filed 2022·Granted Jan 7, 2025·0 cites·22 claims
- 1467US10884345B2Calibration method for a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Jan 5, 2021·0 cites·15 claims
- 1561US10866527B2Methods and apparatus for monitoring a lithographic manufacturing processASML NETHERLANDS BV·Filed 2018·Granted Dec 15, 2020·0 cites·20 claims
- 1661US2025036033A1Method and apparatus for lithographic imagingASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1759US12032297B2Method for monitoring lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Jul 9, 2024·0 cites·20 claims
- 1848US7952685B2Illuminator for a lithographic apparatus and methodZEISS CARL SMT AG·Filed 2007·Granted May 31, 2011·0 cites·24 claims
- 1945US10078273B2Lithographic apparatus with data processing apparatusASML NETHERLANDS BV·Filed 2014·Granted Sep 18, 2018·0 cites·20 claims
- 2044US2022291590A1Modeling method for computational fingerprintsASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →