Inventor · disambiguated record
Shori Mokuo
Also filed as: MOKUO SHORI
13 granted patents·1 pending application·401 citations·filing 1992–2008
93Inventor score
Top patents by PatentIndex Score
14 records- 0193US5671544ASubstrate drying apparatus and substrate drying methodTOKYO ELECTRON LTD·Filed 1996·Granted Sep 30, 1997·56 cites·15 claims
- 0293US5575079ASubstrate drying apparatus and substrate drying methodTOKYO ELECTRON LTD·Filed 1994·Granted Nov 19, 1996·48 cites·11 claims
- 0385US5845660ASubstrate washing and drying apparatus, substrate washing method, and substrate washing apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Dec 8, 1998·84 cites·20 claims
- 0477US6954585B2Substrate processing method and apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Oct 11, 2005·21 cites·11 claims
- 0576US5319216ASubstrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filterTOKYO ELECTRON LTD·Filed 1993·Granted Jun 7, 1994·52 cites·13 claims
- 0671US5911232AUltrasonic cleaning deviceTOKYO ELECTRON LTD·Filed 1997·Granted Jun 15, 1999·39 cites·8 claims
- 0769US5266812ASubstrate detector with light emitting and receiving elements arranged in a staggered fashionTOKYO ELECTRON LTD·Filed 1992·Granted Nov 30, 1993·45 cites·14 claims
- 0863US8216391B2Substrate processing apparatus and substrate processing methodMOKUO SHORI·Filed 2008·Granted Jul 10, 2012·3 cites·14 claims
- 0957US6715348B2Method and apparatus for detecting liquid levelTOKYO ELECTRON LTD·Filed 2001·Granted Apr 6, 2004·6 cites·3 claims
- 1053US6573482B2Heating device, liquid processing apparatus using the heating device and method of detecting failure thereofTOKYO ELECTRON LTD·Filed 2001·Granted Jun 3, 2003·4 cites·18 claims
- 1152US6022185ASubstrate transferring deviceTOKYO ELECTRON LTD·Filed 1996·Granted Feb 8, 2000·19 cites·9 claims
- 1247US5406092AApparatus and method using optical sensors recessed in channel walls for detector substrates in a supportTOKYO ELECTRON LTD·Filed 1993·Granted Apr 11, 1995·17 cites·19 claims
- 1337US2004154651A1Processing liquid tank and processing systemFiled 2003·Application pending·0 cites
- 1434US5666381ACommunication system used in semiconductor device manufacturing equipmentTOKYO ELECTRON LTD·Filed 1994·Granted Sep 9, 1997·7 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →