Inventor · disambiguated record
Grace Hsiu-Ling Chen
Also filed as: CHEN GRACE · CHEN GRACE H · CHEN GRACE HSIU-LING
46 granted patents·5 pending applications·306 citations·filing 2002–2025
98Inventor score
Top patents by PatentIndex Score
51 records- 0198US10043261B2Generating simulated output for a specimenKLA TENCOR CORP·Filed 2017·Granted Aug 7, 2018·32 cites·28 claims
- 0297US9092846B2Detecting defects on a wafer using defect-specific and multi-channel informationKLA TENCOR CORP·Filed 2014·Granted Jul 28, 2015·30 cites·56 claims
- 0395US9726617B2Apparatus and methods for finding a best aperture and mode to enhance defect detectionKLA TENCOR CORP·Filed 2013·Granted Aug 8, 2017·20 cites·23 claims
- 0494US10545099B1Ultra-high sensitivity hybrid inspection with full wafer coverage capabilityKLA TENCOR CORP·Filed 2019·Granted Jan 28, 2020·10 cites·24 claims
- 0594US9709510B2Determining a configuration for an optical element positioned in a collection aperture during wafer inspectionKLA TENCOR CORP·Filed 2015·Granted Jul 18, 2017·23 cites·39 claims
- 0693US10697900B2Correlating SEM and optical images for wafer noise nuisance identificationKLA TENCOR CORP·Filed 2019·Granted Jun 30, 2020·6 cites·18 claims
- 0793US9916965B2Hybrid inspectorsKLA TENCOR CORP·Filed 2016·Granted Mar 13, 2018·13 cites·30 claims
- 0891US9846930B2Detecting defects on a wafer using defect-specific and multi-channel informationKLA TENCOR CORP·Filed 2016·Granted Dec 19, 2017·5 cites·17 claims
- 0990US10648924B2Generating high resolution images from low resolution images for semiconductor applicationsKLA TENCOR CORP·Filed 2017·Granted May 12, 2020·5 cites·27 claims
- 1090US10416087B2Systems and methods for defect detection using image reconstructionKLA TENCOR CORP·Filed 2016·Granted Sep 17, 2019·11 cites·35 claims
- 1189US10527568B2Counting particles using an electrical differential counterMASSACHUSETTS GEN HOSPITAL·Filed 2018·Granted Jan 7, 2020·4 cites·19 claims
- 1288US11270430B2Wafer inspection using difference imagesKLA TENCOR CORP·Filed 2018·Granted Mar 8, 2022·5 cites·18 claims
- 1388US10643819B2Method and system for charged particle microscopy with improved image beam stabilization and interrogationKLA TENCOR CORP·Filed 2016·Granted May 5, 2020·6 cites·28 claims
- 1487US7106432B1Surface inspection system and method for using photo detector array to detect defects in inspection surfaceKLA TENCOR TECH CORP·Filed 2002·Granted Sep 12, 2006·35 cites·13 claims
- 1586US9976973B2Counting particles using an electrical differential counterWATKINS NICHOLAS·Filed 2011·Granted May 22, 2018·11 cites·2 claims
- 1686US9645093B2System and method for apodization in a semiconductor device inspection systemKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·3 cites·46 claims
- 1786US7436503B1Dark field inspection apparatus and methodsKLA TENCOR TECH CORP·Filed 2004·Granted Oct 14, 2008·35 cites·20 claims
- 1885US7535563B1Systems configured to inspect a specimenKLA TENCOR TECH CORP·Filed 2006·Granted May 19, 2009·11 cites·19 claims
- 1984US9552636B2Detecting defects on a wafer using defect-specific and multi-channel informationKLA TENCOR CORP·Filed 2015·Granted Jan 24, 2017·3 cites·67 claims
- 2084US9176069B2System and method for apodization in a semiconductor device inspection systemKLA TENCOR CORP·Filed 2013·Granted Nov 3, 2015·5 cites·44 claims
- 2183US9422517B2Microscale and nanoscale structures for manipulating particlesCHEN GRACE·Filed 2011·Granted Aug 23, 2016·9 cites·20 claims
- 2280US10132760B2Apparatus and methods for finding a best aperture and mode to enhance defect detectionKLA TENCOR CORP·Filed 2017·Granted Nov 20, 2018·1 cites·18 claims
- 2379US9239295B2Variable polarization wafer inspectionKLA TENCOR CORP·Filed 2013·Granted Jan 19, 2016·4 cites·48 claims
- 2477US9703207B1System and method for reducing dynamic range in images of patterned regions of semiconductor wafersCAVAN DANIEL L·Filed 2012·Granted Jul 11, 2017·5 cites·26 claims
- 2574US9816940B2Wafer inspection with focus volumetric methodKLA TENCOR CORP·Filed 2016·Granted Nov 14, 2017·1 cites·25 claims
- 2673US9128064B2Super resolution inspection systemKLA TENCOR CORP·Filed 2013·Granted Sep 8, 2015·2 cites·20 claims
- 2771US9347891B2Wafer and reticle inspection systems and methods for selecting illumination pupil configurationsKLA TENCOR CORP·Filed 2013·Granted May 24, 2016·1 cites·23 claims
- 2868US7505619B2System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surfaceKLA TENCOR TECH CORP·Filed 2005·Granted Mar 17, 2009·2 cites·30 claims
- 2967US10429319B2Inspection system including parallel imaging paths with multiple and selectable spectral bandsKLA TENCOR CORP·Filed 2014·Granted Oct 1, 2019·1 cites·32 claims
- 3065US11760853B2Anti-curling filmIND TECH RES INST·Filed 2021·Granted Sep 19, 2023·0 cites·23 claims
- 3164US12140550B2Selective marking of a substrate with fluorescent conjugated polymer probes having a small form factorKLA CORP·Filed 2023·Granted Nov 12, 2024·0 cites·16 claims
- 3264US2024319096A1Fluorescence mode for workpiece inspectionKLA CORP·Filed 2024·Application pending·0 cites
- 3363US12203857B2Multi-element super resolution optical inspection systemKLA CORP·Filed 2023·Granted Jan 21, 2025·0 cites·21 claims
- 3462US12298254B2System and method for reducing sample noise using selective markersKLA CORP·Filed 2023·Granted May 13, 2025·0 cites·16 claims
- 3562US10921262B2Correlating SEM and optical images for wafer noise nuisance identificationKLA TENCOR CORP·Filed 2020·Granted Feb 16, 2021·0 cites·18 claims
- 3661US8989479B2Region based virtual fourier filterGAO LISHENG·Filed 2011·Granted Mar 24, 2015·3 cites·35 claims
- 3760US9442077B2Scratch filter for wafer inspectionKLA TENCOR CORP·Filed 2014·Granted Sep 13, 2016·1 cites·38 claims
- 3859US2025354929A1System and method for enhancing photoluminescenceKLA CORP·Filed 2025·Application pending·0 cites
- 3957US11120969B2Method and system for charged particle microscopy with improved image beam stabilization and interrogationKLA TENCOR CORP·Filed 2020·Granted Sep 14, 2021·0 cites·18 claims
- 4057US10215713B2Determining a configuration for an optical element positioned in a collection aperture during wafer inspectionKLA TENCOR CORP·Filed 2017·Granted Feb 26, 2019·0 cites·40 claims
- 4157US9523646B2Wafer and reticle inspection systems and methods for selecting illumination pupil configurationsKLA TENCOR CORP·Filed 2016·Granted Dec 20, 2016·0 cites·27 claims
- 4255US12510692B2Protection of optical materials of optical components from radiation degradationKLA CORP·Filed 2021·Granted Dec 30, 2025·0 cites·17 claims
- 4355US11715622B2Material recovery systems for optical componentsKLA CORP·Filed 2021·Granted Aug 1, 2023·0 cites·16 claims
- 4454US2025346805A1Optical method to enhance detection visibility using bright emissive probeKLA CORP·Filed 2025·Application pending·0 cites
- 4554US2023062418A1System and method for feature signal enhancement using a selectively bonded photoluminescent materialKLA CORP·Filed 2022·Application pending·0 cites
- 4650US7317527B1Spatial light modulator fourier transformKLA TENCOR TECH CORP·Filed 2004·Granted Jan 8, 2008·3 cites·16 claims
- 4746US9389166B2Enhanced high-speed logarithmic photo-detector for spot scanning systemKLA TENCOR CORP·Filed 2012·Granted Jul 12, 2016·0 cites·22 claims
- 4842US2022049345A1Fluorine-doped optical materials for optical componentsKLA CORP·Filed 2021·Application pending·0 cites
- 4941US11410830B1Defect inspection and review using transmissive current image of charged particle beam systemKLA TENCOR CORP·Filed 2019·Granted Aug 9, 2022·0 cites·17 claims
- 5039US11668655B2Multimode defect classification in semiconductor inspectionKLA TENCOR CORP·Filed 2019·Granted Jun 6, 2023·0 cites·14 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
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