Inventor · disambiguated record
Yaron Ish-Shalom
Also filed as: ISH-SHALOM YARON
6 granted patents·252 citations·filing 1997–2016
84Inventor score
Top patents by PatentIndex Score
6 records- 0193US6678055B2Method and apparatus for measuring stress in semiconductor wafersTEVET PROCESS CONTROL TECHNOLO·Filed 2001·Granted Jan 13, 2004·139 cites·51 claims
- 0291US10203247B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2016·Granted Feb 12, 2019·10 cites·21 claims
- 0384US6299346B1Active pyrometry with emissivity extrapolation and compensationC I SYSTEMS LTD·Filed 2000·Granted Oct 9, 2001·57 cites·35 claims
- 0471US6082892ATemperature measuring method and apparatusC I SYSTEMS LTD·Filed 1997·Granted Jul 4, 2000·44 cites·17 claims
- 0569US9512985B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2013·Granted Dec 6, 2016·2 cites·50 claims
- 0634US10366483B2Wafer notch detectionKLA TENCOR CORP·Filed 2015·Granted Jul 30, 2019·0 cites·20 claims
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