Inventor · disambiguated record
Mahmood Naim
Also filed as: NAIM MAHMOOD
5 granted patents·53 citations·filing 2002–2016
75Inventor score
Top patents by PatentIndex Score
5 records- 0188US7667944B2Polyceramic e-chuckPRAXAIR TECHNOLOGY INC·Filed 2007·Granted Feb 23, 2010·23 cites·28 claims
- 0283US6754062B2Hybrid ceramic electrostatic clampPRAXAIR TECHNOLOGY INC·Filed 2002·Granted Jun 22, 2004·28 cites·13 claims
- 0380US10388492B2Coated semiconductor processing members having chlorine and fluorine plasma erosion resistance and complex oxide coatings thereforFM IND INC·Filed 2016·Granted Aug 20, 2019·2 cites·15 claims
- 0457US9790581B2Emissivity controlled coatings for semiconductor chamber componentsFM IND INC·Filed 2014·Granted Oct 17, 2017·0 cites·23 claims
- 0536US9543183B2Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing sameFM IND INC·Filed 2013·Granted Jan 10, 2017·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →