Inventor · disambiguated record

Rex L. Biggerstaff

Also filed as: BIGGERSTAFF REX L

2 granted patents·834 citations·filing 1987–1990

75Inventor score

Technology areasH10P

Files withFSI CORP1 FSI INT INC1

Top patents by PatentIndex Score

2 records

0196US4749440AGaseous process and apparatus for removing films from substratesFSI CORP·Filed 1987·Granted Jun 7, 1988·633 cites·59 claims
0289US5169408AApparatus for wafer processing with in situ rinseFSI INT INC·Filed 1990·Granted Dec 8, 1992·201 cites·14 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →