Inventor · disambiguated record
Yukio Takabayashi
Also filed as: TAKABAYASHI YUKIO
25 granted patents·6 pending applications·922 citations·filing 1991–2015
97Inventor score
Top patents by PatentIndex Score
31 records- 0195US6307620B1Substrate holding apparatus, substrate transfer system, exposure apparatus, coating apparatus, method for making a device, and method for cleaning a substrate holding sectionCANON KK·Filed 2000·Granted Oct 23, 2001·109 cites·32 claims
- 0295US5923408ASubstrate holding system and exposure apparatus using the sameCANON KK·Filed 1997·Granted Jul 13, 1999·184 cites·25 claims
- 0394US6762826B2Substrate attracting and holding system for use in exposure apparatusCANON KK·Filed 2003·Granted Jul 13, 2004·80 cites·10 claims
- 0494US6322060B1Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration methodCANON KK·Filed 1999·Granted Nov 27, 2001·81 cites·44 claims
- 0593US6809802B1Substrate attracting and holding system for use in exposure apparatusCANON KK·Filed 2000·Granted Oct 26, 2004·70 cites·44 claims
- 0693US5187519AExposure apparatus having mount means to suppress vibrationsCANON KK·Filed 1991·Granted Feb 16, 1993·87 cites·11 claims
- 0792US6583859B2Stage device, an exposure apparatus and a device manufacturing method using the sameCANON KK·Filed 2001·Granted Jun 24, 2003·35 cites·24 claims
- 0892US6266133B1Stage device, an exposure apparatus and a device manufacturing method using the sameCANON KK·Filed 1999·Granted Jul 24, 2001·84 cites·17 claims
- 0987US5691806AProjection exposure apparatus containing an enclosed hollow structureCANON KK·Filed 1995·Granted Nov 25, 1997·28 cites·23 claims
- 1086US7253975B2Retainer, exposure apparatus, and device fabrication methodCANON KK·Filed 2006·Granted Aug 7, 2007·7 cites·13 claims
- 1180US6493062B2Driving apparatus and exposure apparatusCANON KK·Filed 1999·Granted Dec 10, 2002·61 cites·57 claims
- 1278US6654096B1Exposure apparatus, and device manufacturing methodCANON KK·Filed 2000·Granted Nov 25, 2003·17 cites·14 claims
- 1377US6208408B1Projection exposure apparatus and device manufacturing methodCANON KK·Filed 1998·Granted Mar 27, 2001·38 cites·18 claims
- 1474US9770850B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2014·Granted Sep 26, 2017·2 cites·14 claims
- 1574US7161750B2Retainer, exposure apparatus, and device fabrication methodCANON KK·Filed 2004·Granted Jan 9, 2007·10 cites·3 claims
- 1669US9952504B2Imprint method, imprint apparatus, and method for manufacturing deviceCANON KK·Filed 2014·Granted Apr 24, 2018·1 cites·3 claims
- 1768US10112324B2Imprint method, imprint apparatus, and production method for articleCANON KK·Filed 2014·Granted Oct 30, 2018·1 cites·5 claims
- 1866US7425238B2Substrate holding deviceCANON KK·Filed 2003·Granted Sep 16, 2008·13 cites·17 claims
- 1962US6990386B2Moving mechanism and stage system in exposure apparatusCANON KK·Filed 2002·Granted Jan 24, 2006·6 cites·16 claims
- 2061US7352520B2Holding device and exposure apparatus using the sameCANON KK·Filed 2007·Granted Apr 1, 2008·3 cites·7 claims
- 2157US6965428B2Stage apparatus, exposure apparatus, and semiconductor device manufacturing methodCANON KK·Filed 2003·Granted Nov 15, 2005·5 cites·23 claims
- 2255US2009044837A1Substrate processing apparatusCANON KK·Filed 2008·Application pending·0 cites
- 2351US7346414B2Moving mechanism and stage system in exposure apparatusCANON KK·Filed 2005·Granted Mar 18, 2008·0 cites·10 claims
- 2449US2010002212A1Scanning exposure apparatus, exposure method, and device manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 2548US2009224444A1Vibration suppression apparatus, exposure apparatus, and method of manufacturing deviceCANON KK·Filed 2009·Application pending·0 cites
- 2646US2006017909A1Stage apparatus, exposure apparatus, and semiconductor device manufacturing mehtodCANON KK·Filed 2005·Application pending·0 cites
- 2745US9339970B2Imprint apparatus, and article manufacturing methodCANON KK·Filed 2013·Granted May 17, 2016·0 cites·11 claims
- 2842US2004130692A1Substrate processing apparatusCANON KK·Filed 2003·Application pending·0 cites
- 2941US8179518B2Exposure apparatus to correct position between reticle and substrate according to propagation time and shifting rateTAKABAYASHI YUKIO·Filed 2008·Granted May 15, 2012·0 cites·10 claims
- 3040US2013285270A1Transfer apparatus and method of manufacturing articleCANON KK·Filed 2013·Application pending·0 cites
- 3138US10331027B2Imprint apparatus, imprint system, and method of manufacturing articleCANON KK·Filed 2015·Granted Jun 25, 2019·0 cites·17 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →