Inventor · disambiguated record
Itaru Fujita
Also filed as: FUJITA ITARU
5 granted patents·273 citations·filing 1988–2003
85Inventor score
Files withCANON KK5
Top patents by PatentIndex Score
5 records- 0194US6762826B2Substrate attracting and holding system for use in exposure apparatusCANON KK·Filed 2003·Granted Jul 13, 2004·80 cites·10 claims
- 0293US6809802B1Substrate attracting and holding system for use in exposure apparatusCANON KK·Filed 2000·Granted Oct 26, 2004·70 cites·44 claims
- 0392US4825247AProjection exposure apparatusCANON KK·Filed 1988·Granted Apr 25, 1989·98 cites·13 claims
- 0478US6654096B1Exposure apparatus, and device manufacturing methodCANON KK·Filed 2000·Granted Nov 25, 2003·17 cites·14 claims
- 0563US6809798B1Stage control method, exposure method, exposure apparatus and device manufacturing methodCANON KK·Filed 2000·Granted Oct 26, 2004·8 cites·37 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →