Inventor · disambiguated record
Klaus Michael
Also filed as: MICHAEL KLAUS
11 granted patents·3 pending applications·303 citations·filing 1989–2010
92Inventor score
Top patents by PatentIndex Score
14 records- 0194US4936329ADevice for cleaning, testing and sorting of workpiecesLEYBOLD AG·Filed 1989·Granted Jun 26, 1990·97 cites·6 claims
- 0280US6196154B1Air lock for introducing substrates to and/or removing them from a treatment chamberLEYBOLD SYSTEMS GMBH·Filed 1999·Granted Mar 6, 2001·32 cites·9 claims
- 0377US5423971AArrangement for coating substratesLEYBOLD AG·Filed 1994·Granted Jun 13, 1995·36 cites·12 claims
- 0471US6132562AMethod and device for transporting cylindrical substrates to be coatedLEYBOLD SYSTEMS GMBH·Filed 1999·Granted Oct 17, 2000·38 cites·24 claims
- 0570US5292419ASputtering unitLEYBOLD AG·Filed 1992·Granted Mar 8, 1994·35 cites·12 claims
- 0663US6187160B1Apparatus for the coating of substrates in a vacuum chamberLEYBOLD SYSTEMS GMBH·Filed 1999·Granted Feb 13, 2001·18 cites·4 claims
- 0756US6335054B1Air lock for introducing substrates to and/or removing them from a treatment chamberLEYBOLD SYSTEMS GMBH·Filed 2000·Granted Jan 1, 2002·8 cites·1 claims
- 0855US5108789AMethod for manufacturing disk-shaped recording mediaLEYBOLD AG·Filed 1990·Granted Apr 28, 1992·10 cites·9 claims
- 0949US2011097517A1Dynamic vertical microwave deposition of dielectric layersAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 1048US5097794AApparatus for transporting substrates in a vacuum coating systemLEYBOLD AG·Filed 1990·Granted Mar 24, 1992·19 cites·4 claims
- 1143US2005207874A1Device for coating hollow bodies, in particular plastic bottles, that has a high vaccum region and sluiceMICHAEL KLAUS·Filed 2004·Application pending·0 cites
- 1238US2002037368A1Vacuum treatment system for application of thin, hard layersFiled 2001·Application pending·0 cites
- 1337US6206975B1Vacuum treatment system for application of thin, hard layersLEYBOLD SYSTEMS GMBH·Filed 1999·Granted Mar 27, 2001·7 cites·7 claims
- 1432US4936180AApparatus for machining workpieces, particularly flat circular disk-shaped substratesLEYBOLD AG·Filed 1989·Granted Jun 26, 1990·3 cites·4 claims
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