Inventor · disambiguated record
Atsuyasu Miura
Also filed as: MIURA ATSUYASU
14 granted patents·2 pending applications·13 citations·filing 2013–2024
85Inventor score
Top patents by PatentIndex Score
16 records- 0186US10186435B2Chemical liquid preparation method of preparing a chemical liquid for substrate processing, chemical liquid preparation unit preparing a chemical liquid for substrate processing, and substrate processing systemSCREEN HOLDINGS CO LTD·Filed 2017·Granted Jan 22, 2019·6 cites·3 claims
- 0283US11521865B2Substrate processing method and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2018·Granted Dec 6, 2022·4 cites·21 claims
- 0381US12337289B2Chemical liquid preparation device, and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2024·Granted Jun 24, 2025·0 cites·9 claims
- 0474US9956594B2Substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2015·Granted May 1, 2018·2 cites·11 claims
- 0572US12064739B2Chemical liquid preparation device, and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2022·Granted Aug 20, 2024·0 cites·11 claims
- 0667US10639683B2Recovery piping cleaning method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted May 5, 2020·1 cites·8 claims
- 0758US11439967B2Chemical liquid preparation method, chemical liquid preparation device, and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2018·Granted Sep 13, 2022·0 cites·9 claims
- 0848US2018207685A1Substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Application pending·0 cites
- 0945US10658203B2Substrate processing apparatus and processing cup cleaning methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted May 19, 2020·0 cites·13 claims
- 1045US2013306238A1Chemical liquid preparation method of preparing a chemical liquid for substrate processing, chemical liquid preparation unit preparing a chemical liquid for substrate processing, and substrate processing systemDAINIPPON SCREEN MFG·Filed 2013·Application pending·0 cites
- 1142US9050616B2Substrate treatment apparatus and substrate treatment methodDAINIPPON SCREEN MFG·Filed 2013·Granted Jun 9, 2015·0 cites·4 claims
- 1240US9687887B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2013·Granted Jun 27, 2017·0 cites·8 claims
- 1339US10622225B2Substrate processing apparatus and nozzle cleaning methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Apr 14, 2020·0 cites·8 claims
- 1439US10199243B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted Feb 5, 2019·0 cites·12 claims
- 1538US10854481B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Dec 1, 2020·0 cites·10 claims
- 1636US10786836B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted Sep 29, 2020·0 cites·10 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →