Inventor · disambiguated record
Haixing Zou
Also filed as: ZOU HAIXING
4 granted patents·40 citations·filing 2004–2014
76Inventor score
Top patents by PatentIndex Score
4 records- 0189US7408641B1Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement systemKLA TENCOR TECH CORP·Filed 2005·Granted Aug 5, 2008·20 cites·16 claims
- 0284US9970818B2Spatially resolved optical emission spectroscopy (OES) in plasma processingTOKYO ELECTRON LTD·Filed 2014·Granted May 15, 2018·5 cites·19 claims
- 0374US7869040B1Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement systemKLA TENCOR TECH CORP·Filed 2008·Granted Jan 11, 2011·6 cites·7 claims
- 0461US7190441B1Methods and systems for preparing a sample for thin film analysisKLA TENCOR TECH CORP·Filed 2004·Granted Mar 13, 2007·9 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →