Inventor · disambiguated record
Thomas E. Deacon
Also filed as: DEACON THOMAS E
8 granted patents·3 pending applications·1,421 citations·filing 1989–2008
91Inventor score
Top patents by PatentIndex Score
11 records- 0198US5194401AThermally processing semiconductor wafers at non-ambient pressuresAPPLIED MATERIALS INC·Filed 1992·Granted Mar 16, 1993·580 cites·7 claims
- 0297US4920918APressure-resistant thermal reactor system for semiconductor processingAPPLIED MATERIALS INC·Filed 1989·Granted May 1, 1990·416 cites·28 claims
- 0395US5792269AGas distribution for CVD systemsAPPLIED MATERIALS INC·Filed 1995·Granted Aug 11, 1998·164 cites·14 claims
- 0492US6476362B1Lamp array for thermal processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Nov 5, 2002·63 cites·35 claims
- 0589US5179677AApparatus and method for substrate heating utilizing various infrared means to achieve uniform intensityAPPLIED MATERIALS INC·Filed 1991·Granted Jan 12, 1993·125 cites·5 claims
- 0683US6149987AMethod for depositing low dielectric constant oxide filmsAPPLIED MATERIALS INC·Filed 1998·Granted Nov 21, 2000·61 cites·14 claims
- 0757US6523494B1Apparatus for depositing low dielectric constant oxide filmAPPLIED MATERIALS INC·Filed 2000·Granted Feb 25, 2003·5 cites·17 claims
- 0855US2009159005A1Coatings for semiconductor processing equipmentEPICREW CORP·Filed 2008·Application pending·0 cites
- 0954US2009162997A1Thin diamond like coating for semiconductor processing equipmentDEACON THOMAS E·Filed 2007·Application pending·0 cites
- 1043US2010027273A1Coatings for reflective surfacesEPICREW CORP·Filed 2008·Application pending·0 cites
- 1138US6171966B1Delineation pattern for epitaxial depositionsAPPLIED MATERIALS INC·Filed 1996·Granted Jan 9, 2001·7 cites·13 claims
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