Inventor · disambiguated record
Siyuan Tian
Also filed as: TIAN SIYUAN
16 granted patents·7 pending applications·9 citations·filing 2015–2025
86Inventor score
Top patents by PatentIndex Score
23 records- 0189US11430688B2Two-stage pin lifter for de-chuck operationsLAM RES CORP·Filed 2018·Granted Aug 30, 2022·6 cites·19 claims
- 0279US2024417857A1Connector for substrate support with embedded temperature sensorsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0378US12154814B2Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters arrayLAM RES CORP·Filed 2024·Granted Nov 26, 2024·0 cites·10 claims
- 0478US10522377B2System and method for substrate support feed-forward temperature control based on RF powerLAM RES CORP·Filed 2016·Granted Dec 31, 2019·1 cites·14 claims
- 0578US2025087518A1Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters arrayLAM RES CORP·Filed 2024·Application pending·0 cites
- 0672US11869794B2Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters arrayLAM RES CORP·Filed 2019·Granted Jan 9, 2024·1 cites·15 claims
- 0770US11323007B2Magnetic levitation bearing, magnetic levitation rotor support assembly, and compressorGREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI·Filed 2018·Granted May 3, 2022·1 cites·13 claims
- 0868US12077862B2Connector for substrate support with embedded temperature sensorsLAM RES CORP·Filed 2020·Granted Sep 3, 2024·0 cites·17 claims
- 0966US2025279298A1Rf immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing systemLAM RES CORP·Filed 2025·Application pending·0 cites
- 1066US2023420281A1Reflectometer to monitor substrate movementLAM RES CORP·Filed 2023·Application pending·0 cites
- 1159US10851458B2Connector for substrate support with embedded temperature sensorsLAM RES CORP·Filed 2018·Granted Dec 1, 2020·0 cites·18 claims
- 1257US12308265B2RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing systemLAM RES CORP·Filed 2020·Granted May 20, 2025·0 cites·23 claims
- 1356US2025351726A1Substrate temperature control with integrated thermoelectric cooling systemLAM RES CORP·Filed 2023·Application pending·0 cites
- 1453US11791189B2Reflectometer to monitor substrate movementLAM RES CORP·Filed 2018·Granted Oct 17, 2023·0 cites·29 claims
- 1552US10690184B2Axial magnetic bearing having a protective deviceGREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI·Filed 2017·Granted Jun 23, 2020·0 cites·14 claims
- 1648US11174898B2Wiring structure of magnetic suspension bearing, compressor and air conditionerGREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI·Filed 2018·Granted Nov 16, 2021·0 cites·10 claims
- 1747US10957520B2Long-life high-power terminals for substrate support with embedded heating elementsLAM RES CORP·Filed 2018·Granted Mar 23, 2021·0 cites·19 claims
- 1847US10746223B2Protective structure for magnetic bearing and magnetic bearing assemblyGREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI·Filed 2017·Granted Aug 18, 2020·0 cites·8 claims
- 1941US10851835B2Stator assembly of a magnetic suspension bearing and manufacturing methodGREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI·Filed 2016·Granted Dec 1, 2020·0 cites·12 claims
- 2041US2023178407A1Floating pcb design for substrate support assemblyLAM RES CORP·Filed 2021·Application pending·0 cites
- 2140US10207469B2Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areasUNIV HOUSTON SYSTEM·Filed 2015·Granted Feb 19, 2019·0 cites·23 claims
- 2240US2023105556A1Substrate supports including bonding layers with stud arrays for substrate processing systemsLAM RES CORP·Filed 2021·Application pending·0 cites
- 2337US10767692B2Magnetic levitation bearing assembly and compressorGREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI·Filed 2017·Granted Sep 8, 2020·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →