Inventor · disambiguated record
Martinus Joseph Kok
Also filed as: KOK MARTINUS JOSEPH
7 granted patents·11 citations·filing 2006–2016
76Inventor score
Top patents by PatentIndex Score
7 records- 0181US7659988B2Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Feb 9, 2010·7 cites·18 claims
- 0266US7999940B2Apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2006·Granted Aug 16, 2011·2 cites·26 claims
- 0361US10101677B2Inspection apparatus for measuring properties of a target structure, methods of operating an optical system, method of manufacturing devicesASML NETHERLANDS BV·Filed 2016·Granted Oct 16, 2018·1 cites·12 claims
- 0455US8773640B2Inspection method and apparatusSEIJGER OLAV JOHANNES·Filed 2009·Granted Jul 8, 2014·1 cites·14 claims
- 0548US8797509B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodSEIJGER OLAV JOHANNES·Filed 2009·Granted Aug 5, 2014·0 cites·19 claims
- 0648US7999943B2Device manufacturing method with angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2010·Granted Aug 16, 2011·0 cites·8 claims
- 0742US8922755B2Support structure, inspection apparatus, lithographic apparatus and methods for loading and unloading substratesSEIJGER OLAV JOHANNES·Filed 2009·Granted Dec 30, 2014·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →