Inventor · disambiguated record
Tetsuhiro Iwai
Also filed as: IWAI TETSUHIRO
23 granted patents·10 pending applications·218 citations·filing 2000–2022
95Inventor score
Files withMATSUSHITA ELECTRIC INDUSTRIAL CO LTD12PANASONIC IP MAN CO LTD10PANASONIC CORP5IWAI TETSUHIRO2DISCO CORP1
Top patents by PatentIndex Score
33 records- 0195US7994026B2Plasma dicing apparatus and method of manufacturing semiconductor chipsPANASONIC CORP·Filed 2008·Granted Aug 9, 2011·31 cites·2 claims
- 0294US6784112B2Method for surface treatment of silicon based substrateMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Aug 31, 2004·81 cites·7 claims
- 0386US8513097B2Plasma processing apparatusIWAI TETSUHIRO·Filed 2008·Granted Aug 20, 2013·9 cites·2 claims
- 0485US9401286B2Plasma processing apparatusPANASONIC CORP·Filed 2013·Granted Jul 26, 2016·4 cites·17 claims
- 0579US8945411B2Plasma processing apparatus and plasma processing methodIWAI TETSUHIRO·Filed 2012·Granted Feb 3, 2015·5 cites·7 claims
- 0677US10796932B2Plasma processing apparatusPANASONIC IP MAN CO LTD·Filed 2017·Granted Oct 6, 2020·1 cites·17 claims
- 0775US6340639B1Plasma process apparatus and plasma process method for substrateMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Jan 22, 2002·11 cites·18 claims
- 0874US9842750B2Plasma processing methodPANASONIC IP MAN CO LTD·Filed 2016·Granted Dec 12, 2017·1 cites·17 claims
- 0974US9583355B2Plasma processing apparatus and plasma processing methodPANASONIC CORP·Filed 2014·Granted Feb 28, 2017·3 cites·2 claims
- 1074US7708860B2Plasma processing apparatusPANASONIC CORP·Filed 2004·Granted May 4, 2010·17 cites·13 claims
- 1173US11551943B2Plasma processing apparatusPANASONIC IP MAN CO LTD·Filed 2020·Granted Jan 10, 2023·0 cites·10 claims
- 1273US7056831B2Plasma processing apparatus and plasma processing methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Jun 6, 2006·13 cites·3 claims
- 1370US6511895B2Semiconductor wafer turning processDISCO CORP·Filed 2001·Granted Jan 28, 2003·12 cites·4 claims
- 1464US6921720B2Plasma treating apparatus and plasma treating methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Jul 26, 2005·9 cites·9 claims
- 1563US2023167553A1Plasma processing apparatus and method for using plasma processing apparatusPANASONIC IP MAN CO LTD·Filed 2022·Application pending·0 cites
- 1662US6867146B2Plasma processing methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Mar 15, 2005·8 cites·4 claims
- 1756US6468351B1Vacuum processing apparatus with improved maintainabilityMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Oct 22, 2002·5 cites·14 claims
- 1855US2018019099A1Plasma processing apparatusPANASONIC IP MAN CO LTD·Filed 2017·Application pending·0 cites
- 1951US2016118229A1Plasma processing apparatusPANASONIC IP MAN CO LTD·Filed 2015·Application pending·0 cites
- 2050US7138034B2Electrode member used in a plasma treating apparatusKROSAKI HARIMA CORP·Filed 2002·Granted Nov 21, 2006·4 cites·8 claims
- 2149US7074720B2Plasma treating apparatus, plasma treating method and method of manufacturing semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Jul 11, 2006·2 cites·11 claims
- 2249US6723651B2Plasma processing methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Apr 20, 2004·2 cites·6 claims
- 2348US2009011120A1Plasma Treating Apparatus, Electrode Member for Plasma Treating Apparatus, Electrode Member Manufacturing Method and Recycling MethodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2006·Application pending·0 cites
- 2448US2005247404A1Plasma processing apparatus and plasma processing methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2005·Application pending·0 cites
- 2547US2009008035A1Plasma processing apparatusMATSUSHITA ELECTRIC IND CO LDT·Filed 2006·Application pending·0 cites
- 2645US2005279459A1Plasma treating apparatus and plasma treating methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2005·Application pending·0 cites
- 2744US10672593B2Plasma processing apparatus and plasma processing methodPANASONIC IP MAN CO LTD·Filed 2017·Granted Jun 2, 2020·0 cites·17 claims
- 2843US10734203B2Plasma processing apparatus and plasma processing methodPANASONIC IP MAN CO LTD·Filed 2017·Granted Aug 4, 2020·0 cites·9 claims
- 2942US2014332497A1Plasma processing apparatus and plasma processing methodPANASONIC CORP·Filed 2014·Application pending·0 cites
- 3041US2003082914A1Semiconductor wafer processing apparatusFiled 2002·Application pending·0 cites
- 3140US6551444B2Plasma processing apparatus and method of processingMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Apr 22, 2003·0 cites·8 claims
- 3237US9786472B2Plasma processing apparatus and method for manufacturing electronic componentPANASONIC IP MAN CO LTD·Filed 2015·Granted Oct 10, 2017·0 cites·6 claims
- 3335US2016118284A1Plasma processing apparatusPANASONIC IP MAN CO LTD·Filed 2015·Application pending·0 cites
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