Inventor · disambiguated record
Werner Scheler
Also filed as: SCHELER WERNER
12 granted patents·952 citations·filing 1984–2003
94Inventor score
Technology areasH10P
Files withJENOPTIK JENA GMBH4JENOPTIK TECHNOLOGIE GMBH3BROOKS AUTOMATION GMBH2BROOKS AUTOMATION INC2BATTIG UDO1
Top patents by PatentIndex Score
12 records- 0196US5772386ALoading and unloading station for semiconductor processing installationsJENOPTIK JENA GMBH·Filed 1996·Granted Jun 30, 1998·186 cites·14 claims
- 0295US6000732AArrangement for locking and unlocking a door of a containerJENOPTIK JENA GMBH·Filed 1996·Granted Dec 14, 1999·443 cites·4 claims
- 0392US6375403B1Loading and unloading station for semiconductor processing installationsBROOKS AUTOMATION GMBH·Filed 2000·Granted Apr 23, 2002·44 cites·68 claims
- 0490US6837663B2Loading and unloading station for semiconductor processing installationsBROOKS AUTOMATION INC·Filed 2003·Granted Jan 4, 2005·32 cites·40 claims
- 0590US6609876B2Loading and unloading station for semiconductor processing installationsBROOKS AUTOMATION INC·Filed 2001·Granted Aug 26, 2003·34 cites·45 claims
- 0688US6071059ALoading and unloading station for semiconductor processing installationsBROOKS AUTOMATION GMBH·Filed 1998·Granted Jun 6, 2000·68 cites·2 claims
- 0779US6461094B1Loading and unloading station for semiconductor processing installationsJENOPTIK JENA GMBH·Filed 2000·Granted Oct 8, 2002·15 cites·60 claims
- 0879US5655869ADevice for coupling loading and unloading devices with semiconductor processing machinesJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Aug 12, 1997·69 cites·11 claims
- 0955US5642978ADevice for handling disk-shaped objects in a handling plane of a local clean roomJENOPTIK JENA GMBH·Filed 1996·Granted Jul 1, 1997·23 cites·13 claims
- 1053US4583847AMounting table for wafersBATTIG UDO·Filed 1984·Granted Apr 22, 1986·24 cites·9 claims
- 1135US5715929ACharging device for semiconductor processing installationsJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Feb 10, 1998·9 cites·15 claims
- 1232US5636724ADevice for transferring a transport object between two end positionsJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Jun 10, 1997·5 cites·16 claims
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