Inventor · disambiguated record
Masao Iga
Also filed as: IGA MASAO
5 granted patents·3 pending applications·142 citations·filing 1997–2005
83Inventor score
Top patents by PatentIndex Score
8 records- 0189US6874516B2Substrate cleaning apparatusM FSI LTD·Filed 2002·Granted Apr 5, 2005·69 cites·7 claims
- 0272US6743301B2Substrate treatment process and apparatusM & CIRCLESOLID FSI LTD·Filed 2000·Granted Jun 1, 2004·34 cites·19 claims
- 0356US6024045AApparatus for fabricating semiconductor device and method for fabricating semiconductor deviceFUJITSU LTD·Filed 1998·Granted Feb 15, 2000·18 cites·10 claims
- 0452US5919336AApparatus for fabricating semiconductor device and method for fabricating semiconductor deviceFUJITSU LTD·Filed 1997·Granted Jul 6, 1999·15 cites·13 claims
- 0546US2005183749A1Substrate cleaning apparatusM FSI LTD·Filed 2005·Application pending·0 cites
- 0646US2005183750A1Substrate cleaning apparatusM FSI LTD·Filed 2005·Application pending·0 cites
- 0746US2005150530A1Substrate cleaning apparatusM FSI LTD·Filed 2005·Application pending·0 cites
- 0843US6983756B2Substrate treatment process and apparatusM FSI LTD·Filed 2004·Granted Jan 10, 2006·6 cites·9 claims
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