Assignee
M FSI LTD
JP·6 granted patents·5 pending applications·135 citations·filing 2001–2005
Top patents by PatentIndex Score
11 records- 0189US6874516B2Substrate cleaning apparatusM FSI LTD·Filed 2002·Granted Apr 5, 2005·69 cites·7 claims
- 0274US6767124B2Slurry mixing feeder and slurry mixing and feeding methodM FSI LTD·Filed 2002·Granted Jul 27, 2004·20 cites·8 claims
- 0368US6722055B2Supporting fixture of substrate and drying method of substrate surface using the sameM FSI LTD·Filed 2002·Granted Apr 20, 2004·14 cites·8 claims
- 0465US6866723B2Wet cleaning process and wet cleaning equipmentM FSI LTD·Filed 2001·Granted Mar 15, 2005·14 cites·20 claims
- 0559US7238295B2Regeneration process of etching solution, etching process, and etching systemM FSI LTD·Filed 2003·Granted Jul 3, 2007·12 cites·11 claims
- 0646US2005183749A1Substrate cleaning apparatusM FSI LTD·Filed 2005·Application pending·0 cites
- 0746US2005183750A1Substrate cleaning apparatusM FSI LTD·Filed 2005·Application pending·0 cites
- 0846US2005150530A1Substrate cleaning apparatusM FSI LTD·Filed 2005·Application pending·0 cites
- 0943US6983756B2Substrate treatment process and apparatusM FSI LTD·Filed 2004·Granted Jan 10, 2006·6 cites·9 claims
- 1037US2004049301A1Apparatus and method for preparing and supplying slurry for CMP machineM FSI LTD·Filed 2003·Application pending·0 cites
- 1128US2001053585A1Cleaning process for substrate surfaceM FSI LTD·Filed 2001·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →