Inventor · disambiguated record
Hikaru Masuta
Also filed as: MASUTA HIKARU
5 granted patents·13 citations·filing 2010–2022
71Inventor score
Top patents by PatentIndex Score
5 records- 0185US10041779B2Surface shape measuring method, misalignment amount calculating method, and surface shape measuring deviceTOKYO SEIMITSU CO LTD·Filed 2018·Granted Aug 7, 2018·6 cites·6 claims
- 0275US9069008B2Inspection apparatus for semiconductor devices and chuck stage for the inspection apparatus that is movable with respect to the front and back side electrodesNIHON MICRONICS KK·Filed 2012·Granted Jun 30, 2015·5 cites·9 claims
- 0354US8471586B2Wafer prober for semiconductor inspection and inspection methodWASHIO KENICHI·Filed 2010·Granted Jun 25, 2013·1 cites·10 claims
- 0453US12373974B2Shape measurement device and method for controlling sameTOKYO SEIMITSU CO LTD·Filed 2022·Granted Jul 29, 2025·0 cites·17 claims
- 0553US9146256B2Probe assembly for inspecting power semiconductor devices and inspection apparatus using the same, the probe assembly having a probe block, a probe, and a cooling deviceNIHON MICRONICS KK·Filed 2012·Granted Sep 29, 2015·1 cites·9 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →