Inventor · disambiguated record
Robert M. Danen
Also filed as: DANEN ROBERT · DANEN ROBERT M
25 granted patents·3 pending applications·138 citations·filing 2001–2023
95Inventor score
Top patents by PatentIndex Score
28 records- 0195US9726617B2Apparatus and methods for finding a best aperture and mode to enhance defect detectionKLA TENCOR CORP·Filed 2013·Granted Aug 8, 2017·20 cites·23 claims
- 0294US9709510B2Determining a configuration for an optical element positioned in a collection aperture during wafer inspectionKLA TENCOR CORP·Filed 2015·Granted Jul 18, 2017·23 cites·39 claims
- 0393US10338002B1Methods and systems for selecting recipe for defect inspectionKLA TENCOR CORP·Filed 2017·Granted Jul 2, 2019·14 cites·32 claims
- 0493US9696264B2Apparatus and methods for determining defect depths in vertical stack memoryKLA TENCOR CORP·Filed 2014·Granted Jul 4, 2017·21 cites·22 claims
- 0591US11921052B2Inspection with previous step subtractionKLA CORP·Filed 2023·Granted Mar 5, 2024·1 cites·38 claims
- 0690US9389349B2System and method to determine depth for optical wafer inspectionKLA TENCOR CORP·Filed 2013·Granted Jul 12, 2016·12 cites·23 claims
- 0788US11047806B2Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structuresKLA TENCOR CORP·Filed 2017·Granted Jun 29, 2021·8 cites·26 claims
- 0888US10887580B2Three-dimensional imaging for semiconductor wafer inspectionKLA TENCOR CORP·Filed 2017·Granted Jan 5, 2021·8 cites·27 claims
- 0988US9989479B1System and method to determine depth for optical wafer inspectionKLA TENCOR CORP·Filed 2016·Granted Jun 5, 2018·6 cites·35 claims
- 1086US9645093B2System and method for apodization in a semiconductor device inspection systemKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·3 cites·46 claims
- 1184US9176069B2System and method for apodization in a semiconductor device inspection systemKLA TENCOR CORP·Filed 2013·Granted Nov 3, 2015·5 cites·44 claims
- 1281US7940384B2Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimenKLA TENCOR CORP·Filed 2007·Granted May 10, 2011·7 cites·28 claims
- 1380US10132760B2Apparatus and methods for finding a best aperture and mode to enhance defect detectionKLA TENCOR CORP·Filed 2017·Granted Nov 20, 2018·1 cites·18 claims
- 1478US10615067B2Phase filter for enhanced defect detection in multilayer structureKLA TENCOR CORP·Filed 2018·Granted Apr 7, 2020·1 cites·11 claims
- 1576US10317347B2Determining information for defects on wafersKLA TENCOR CORP·Filed 2014·Granted Jun 11, 2019·2 cites·21 claims
- 1676US8705027B2Optical defect amplification for improved sensitivity on patterned layersLANGE STEVEN R·Filed 2010·Granted Apr 22, 2014·3 cites·16 claims
- 1771US9347891B2Wafer and reticle inspection systems and methods for selecting illumination pupil configurationsKLA TENCOR CORP·Filed 2013·Granted May 24, 2016·1 cites·23 claims
- 1869US7710564B1Polarized broadband wafer inspectionKLA TENCOR CORP·Filed 2008·Granted May 4, 2010·2 cites·19 claims
- 1965US10571407B2Determining information for defects on wafersKLA TENCOR CORP·Filed 2019·Granted Feb 25, 2020·0 cites·20 claims
- 2060US10957568B1Phase filter for enhanced defect detection in multilayer structureKLA TENCOR CORP·Filed 2020·Granted Mar 23, 2021·0 cites·18 claims
- 2157US10215713B2Determining a configuration for an optical element positioned in a collection aperture during wafer inspectionKLA TENCOR CORP·Filed 2017·Granted Feb 26, 2019·0 cites·40 claims
- 2257US9523646B2Wafer and reticle inspection systems and methods for selecting illumination pupil configurationsKLA TENCOR CORP·Filed 2016·Granted Dec 20, 2016·0 cites·27 claims
- 2353US2023351553A1Shot noise reduction using frame averagingKLA CORP·Filed 2023·Application pending·0 cites
- 2450US10621718B2Aided image reconstructionKLA TENCOR CORP·Filed 2019·Granted Apr 14, 2020·0 cites·18 claims
- 2546US10249546B2Reverse decoration for defect detection amplificationKLA TENCOR CORP·Filed 2016·Granted Apr 2, 2019·0 cites·5 claims
- 2644US10928740B2Three-dimensional calibration structures and methods for measuring buried defects on a three-dimensional semiconductor waferKLA TENCOR CORP·Filed 2017·Granted Feb 23, 2021·0 cites·30 claims
- 2738US2005033185A1Method for correcting vessel and background light intensities used in beer's law for light scattering in tissueCYTOMETRICS LLC·Filed 2003·Application pending·0 cites
- 2828US2004024296A1System, method and computer program product for screening a spectral imageFiled 2001·Application pending·0 cites
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