Inventor · disambiguated record
Tomio Uno
Also filed as: UNO TOMIO
17 granted patents·633 citations·filing 1997–2006
96Inventor score
Top patents by PatentIndex Score
17 records- 0194US6422264B2Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatusFUJIKIN KK·Filed 2000·Granted Jul 23, 2002·64 cites·5 claims
- 0292US6394415B1Fluid control valve and fluid supply/exhaust systemOHMI TADAHIRO·Filed 2000·Granted May 28, 2002·43 cites·18 claims
- 0391US6820632B2Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatusFUJIKIN KK·Filed 2002·Granted Nov 23, 2004·39 cites·3 claims
- 0491US6302130B1Method and apparatus for detection of orifice clogging in pressure-type flow rate controllersFUJIKIN KK·Filed 1999·Granted Oct 16, 2001·77 cites·10 claims
- 0590US6152168APressure-type flow rate control apparatusFUJIKIN KK·Filed 1998·Granted Nov 28, 2000·112 cites·15 claims
- 0689US6450190B2Method of detecting abnormalities in flow rate in pressure-type flow controllerOHMI TADAHIRO·Filed 2001·Granted Sep 17, 2002·57 cites·5 claims
- 0788US6289923B1Gas supply system equipped with pressure-type flow rate control unitFUJIKIN KK·Filed 1999·Granted Sep 18, 2001·61 cites·7 claims
- 0881US7085628B2Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Aug 1, 2006·26 cites·18 claims
- 0981US6964279B2Pressure-type flow rate control apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Nov 15, 2005·27 cites·6 claims
- 1077US7926509B2Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the methodFUJIKIN KK·Filed 2005·Granted Apr 19, 2011·6 cites·12 claims
- 1177US7798167B2Internal pressure controller of chamber and internal pressure subject-to-control type chamberFUJIKIN KK·Filed 2006·Granted Sep 21, 2010·14 cites·8 claims
- 1277US6193212B1Fluid control valve and fluid supply/exhaust systemOHMI TADAHIRO·Filed 1997·Granted Feb 27, 2001·30 cites·17 claims
- 1376US6848470B2Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatusFUJIKIN KK·Filed 2004·Granted Feb 1, 2005·15 cites·7 claims
- 1473US6158679AOrifice for pressure type flow rate control unit and process for manufacturing orificeFUJIKIN KK·Filed 1998·Granted Dec 12, 2000·37 cites·4 claims
- 1561US7367241B2Differential pressure type flowmeter and differential pressure type flow controllerFUJIKIN KK·Filed 2004·Granted May 6, 2008·10 cites·15 claims
- 1659US7219533B2Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing methodFUJIKIN KK·Filed 2004·Granted May 22, 2007·7 cites·17 claims
- 1754US7594517B2Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employedFUJIKIN KK·Filed 2004·Granted Sep 29, 2009·8 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →