Inventor · disambiguated record
Hiroyuki Kanata
Also filed as: KANATA HIROYUKI
6 granted patents·55 citations·filing 1995–2007
82Inventor score
Top patents by PatentIndex Score
6 records- 0178US7585739B2Semiconductor device and method of fabricating the sameFUJITSU MICROELECTRONICS LTD·Filed 2007·Granted Sep 8, 2009·6 cites·8 claims
- 0258US5667923ACharged particle beam exposure compensating proximity effectFUJITSU LTD·Filed 1996·Granted Sep 16, 1997·27 cites·4 claims
- 0352US6033134AResist developing apparatus used in process for production of semiconductor deviceFUJITSU LTD·Filed 1998·Granted Mar 7, 2000·13 cites·11 claims
- 0451US7321151B2Semiconductor device and method of fabricating the sameFUJITSU LTD·Filed 2004·Granted Jan 22, 2008·4 cites·18 claims
- 0550US7663187B2Semiconductor device and method of fabricating the sameFUJITSU MICROELECTRONICS LTD·Filed 2007·Granted Feb 16, 2010·0 cites·3 claims
- 0637US5783367AProcess for production of semiconductor device and resist developing apparatus used thereinFUJITSU LTD·Filed 1995·Granted Jul 21, 1998·5 cites·21 claims
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