Inventor · disambiguated record
Nigel P. Smith
Also filed as: SMITH NIGEL · SMITH NIGEL P · SMITH NIGEL PETER
35 granted patents·9 pending applications·438 citations·filing 1986–2025
97Inventor score
Top patents by PatentIndex Score
44 records- 0196US7474401B2Multi-layer alignment and overlay target and measurement methodIBM·Filed 2005·Granted Jan 6, 2009·38 cites·32 claims
- 0294US8339605B2Multilayer alignment and overlay target and measurement methodAUSSCHNITT CHRISTOPHER P·Filed 2010·Granted Dec 25, 2012·11 cites·4 claims
- 0391US6361311B1Low burning candleGLOBOL CHEM UK LTD·Filed 2000·Granted Mar 26, 2002·75 cites·14 claims
- 0490US8107079B2Multi layer alignment and overlay target and measurement methodAUSSCHNITT CHRISTOPHER P·Filed 2010·Granted Jan 31, 2012·6 cites·19 claims
- 0590US7473502B1Imaging tool calibration artifact and methodIBM·Filed 2007·Granted Jan 6, 2009·52 cites·20 claims
- 0689US10830709B2Interferometer with pixelated phase shift maskONTO INNOVATION INC·Filed 2018·Granted Nov 10, 2020·5 cites·19 claims
- 0789US7876439B2Multi layer alignment and overlay target and measurement methodIBM·Filed 2008·Granted Jan 25, 2011·8 cites·34 claims
- 0889US7477396B2Methods and systems for determining overlay error based on target image symmetryNANOMETRICS INC·Filed 2006·Granted Jan 13, 2009·14 cites·14 claims
- 0989US7379184B2Overlay measurement targetNANOMETRICS INC·Filed 2005·Granted May 27, 2008·28 cites·27 claims
- 1088US10288408B2Scanning white-light interferometry system for characterization of patterned semiconductor featuresNANOMETRICS INC·Filed 2016·Granted May 14, 2019·5 cites·35 claims
- 1188US7532317B2Scatterometry method with characteristic signatures matchingIND TECH RES INST·Filed 2005·Granted May 12, 2009·16 cites·24 claims
- 1287US10935501B2Sub-resolution defect detectionONTO INNOVATION INC·Filed 2018·Granted Mar 2, 2021·4 cites·51 claims
- 1385US6555068B2Apparatus incorporating air modifying agentsGLOBOL CHEM UK LTD·Filed 2002·Granted Apr 29, 2003·46 cites·21 claims
- 1484US7847939B2Overlay measurement targetNANOMETRICS INC·Filed 2008·Granted Dec 7, 2010·12 cites·24 claims
- 1582US7808643B2Determining overlay error using an in-chip overlay targetNANOMETRICS INC·Filed 2008·Granted Oct 5, 2010·9 cites·39 claims
- 1681US12386271B2Multi-layer calibration for empirical overlay measurementONTO INNOVATION INC·Filed 2022·Granted Aug 12, 2025·1 cites·20 claims
- 1777US9564105B2Programmable level shifter for LCD systemsTEXAS INSTRUMENTS DEUTSCHLAND·Filed 2014·Granted Feb 7, 2017·2 cites·16 claims
- 1877US8390556B2Level shifter for use in LCD display applicationsSMITH NIGEL P·Filed 2011·Granted Mar 5, 2013·4 cites·20 claims
- 1975US10107621B2Image based overlay measurement with finite gratingsNANOMETRICS INC·Filed 2013·Granted Oct 23, 2018·2 cites·39 claims
- 2073US9239523B2Diffraction based overlay linearity testingLI JIE·Filed 2011·Granted Jan 19, 2016·2 cites·20 claims
- 2173US8674744B2Electronic device and method for providing a digital signal at a level shifter outputSMITH NIGEL P·Filed 2011·Granted Mar 18, 2014·5 cites·10 claims
- 2270US4737648AApparatus for detecting fibrous particle sizes by detecting scattered light at different anglesVG INSTR GROUP·Filed 1986·Granted Apr 12, 1988·29 cites·23 claims
- 2368US6562294B1Apparatus and method for disseminating an air modifying agentGLOBOL CHEM UK LTD·Filed 2000·Granted May 13, 2003·12 cites·33 claims
- 2467US10774891B2Electromechanical actuatorTRW LTD·Filed 2016·Granted Sep 15, 2020·1 cites·8 claims
- 2562US2024337627A1System and method for fast microscopyONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 2660US6368564B1Apparatus for incorporating air modifying agentsGLOBOL CHEMICAL UK LTD·Filed 1997·Granted Apr 9, 2002·44 cites·35 claims
- 2756US10229648B2Programmable level shifter for LCD systemsTEXAS INSTRUMENTS INC·Filed 2017·Granted Mar 12, 2019·0 cites·5 claims
- 2855US11150195B2Sample surface polarization modification in interferometric defect inspectionONTO INNOVATION INC·Filed 2020·Granted Oct 19, 2021·0 cites·23 claims
- 2953US7619753B2Method for measuring dimensions and optical system using the sameIND TECH RES INST·Filed 2006·Granted Nov 17, 2009·2 cites·20 claims
- 3048US7355713B2Method for inspecting a grating biochipIND TECH RES INST·Filed 2006·Granted Apr 8, 2008·0 cites·18 claims
- 3148US2025283811A1Variable wavelength interferometryONTO INNOVATION INC·Filed 2025·Application pending·0 cites
- 3247US2004262418A1Air FreshenerSMITH NIGEL PETER·Filed 2002·Application pending·0 cites
- 3345US7800824B2Method for designing gratingsIND TECH RES INST·Filed 2007·Granted Sep 21, 2010·2 cites·9 claims
- 3444US2005247725A1DispenserMCBRIDE ROBERT LTD·Filed 2003·Application pending·0 cites
- 3543US2009296075A1Imaging Diffraction Based OverlayNANOMETRICS INC·Filed 2008·Application pending·0 cites
- 3642US11557967B2Voltage regulator with adaptive feed-forward compensation for periodic loadsTEXAS INSTRUMENTS INC·Filed 2013·Granted Jan 17, 2023·0 cites·19 claims
- 3740US11597429B2Electric power assisted steeringTRW LTD·Filed 2018·Granted Mar 7, 2023·0 cites·9 claims
- 3840US10773701B2Electromechanical actuatorTRW LTD·Filed 2016·Granted Sep 15, 2020·0 cites·10 claims
- 3940US7013498B1DispenserGLOBAL CHEMICALS UK LTD·Filed 2000·Granted Mar 21, 2006·3 cites·10 claims
- 4037US2007222088A1Overlay Metrology MarkAOTI OPERATING CO INC·Filed 2004·Application pending·0 cites
- 4136US2007069398A1Overlay metrology markSMITH NIGEL P·Filed 2004·Application pending·0 cites
- 4236US2004144854A1Apparatus for holding and dispensing an air modifying agentSMITH NIGEL PETER·Filed 2003·Application pending·0 cites
- 4334US10937705B2Sample inspection using topographyONTO INNOVATION INC·Filed 2018·Granted Mar 2, 2021·0 cites·41 claims
- 4434US2006117293A1Method for designing an overlay markSMITH NIGEL·Filed 2005·Application pending·0 cites
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